Research output: Other contribution › Other research output
}
TY - GEN
T1 - Fluid control for micro total analysis systems
AU - Oosterbroek, R.E.
AU - Lammerink, Theodorus S.J.
AU - Berenschot, Johan W.
AU - van den Berg, Albert
AU - Elwenspoek, Michael Curt
PY - 1997/6/17
Y1 - 1997/6/17
KW - METIS-114700
M3 - Other contribution
ER -