@inproceedings{2ef09f7157e140f992417393d83e9f65,
title = "Fluorocarbon coated micromachined gas sampling device",
keywords = "METIS-200474, IR-42138",
author = "B.H. Timmer and Bomer, {Johan G.} and {van Delft}, K.M. and R.P. Otjes and Wouter Olthuis and Piet Bergveld",
year = "2001",
month = oct,
day = "21",
language = "Undefined",
isbn = "1-4020-0148-7",
series = "MESA monographs",
publisher = "Kluwer Academic Publishers",
pages = "381--382",
editor = "Ramsey, {J. Michael} and {van den Berg}, Albert",
booktitle = "Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA",
address = "Netherlands",
note = "null ; Conference date: 21-10-2001 Through 25-10-2001",
}