Fluorocarbon coated micromachined gas sampling device

B.H. Timmer, J.G. Bomer, K.M. van Delft, R.P. Otjes, W. Olthuis, P. Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.
    Original languageEnglish
    Title of host publicationMicro Total Analysis Systems 2001
    Subtitle of host publicationProceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001
    EditorsJ. Michael Ramsey, Albert van den Berg
    Place of PublicationDordrecht
    PublisherKluwer Academic Publishers
    Pages381-382
    Number of pages2
    ISBN (Electronic)978-94-010-1015-3
    ISBN (Print)978-1-4020-0148-2, 978-94-010-3893-5
    DOIs
    Publication statusPublished - 21 Oct 2001
    Event5th International Conference on Micro Total Analysis Systems, µTAS 2001 - Monterey, United States
    Duration: 21 Oct 200125 Oct 2001
    Conference number: 5

    Conference

    Conference5th International Conference on Micro Total Analysis Systems, µTAS 2001
    Abbreviated titleMicroTAS
    Country/TerritoryUnited States
    CityMonterey
    Period21/10/0125/10/01

    Keywords

    • NLA

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