Fluorocarbon coated micromachined gas sampling device

B.H. Timmer; Johan G. Bomer; K.M. van Delft; R.P. Otjes; Wouter Olthuis; Piet Bergveld

Fluorocarbon coated micromachined gas sampling device

B.H. Timmer, Johan G. Bomer, K.M. van Delft, R.P. Otjes, Wouter Olthuis, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA
Editors	J. Michael Ramsey, Albert van den Berg
Place of Publication	Dordrecht/Boston/London
Publisher	Kluwer Academic Publishers
Pages	381-382
Number of pages	2
ISBN (Print)	1-4020-0148-7
Publication status	Published - 21 Oct 2001

Publication series

Name	MESA monographs

Keywords

METIS-200474
IR-42138

Cite this

Timmer, B. H., Bomer, J. G., van Delft, K. M., Otjes, R. P., Olthuis, W., & Bergveld, P. (2001). Fluorocarbon coated micromachined gas sampling device. In J. M. Ramsey, & A. van den Berg (Eds.), Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA (pp. 381-382). (MESA monographs). Dordrecht/Boston/London: Kluwer Academic Publishers.

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author = "B.H. Timmer and Bomer, {Johan G.} and {van Delft}, K.M. and R.P. Otjes and Wouter Olthuis and Piet Bergveld",

year = "2001",

month = "10",

day = "21",

language = "Undefined",

isbn = "1-4020-0148-7",

series = "MESA monographs",

publisher = "Kluwer Academic Publishers",

pages = "381--382",

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Fluorocarbon coated micromachined gas sampling device. / Timmer, B.H.; Bomer, Johan G.; van Delft, K.M.; Otjes, R.P.; Olthuis, Wouter; Bergveld, Piet.

Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA. ed. / J. Michael Ramsey; Albert van den Berg. Dordrecht/Boston/London : Kluwer Academic Publishers, 2001. p. 381-382 (MESA monographs).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fluorocarbon coated micromachined gas sampling device

AU - Timmer, B.H.

AU - Bomer, Johan G.

AU - van Delft, K.M.

AU - Otjes, R.P.

AU - Olthuis, Wouter

AU - Bergveld, Piet

PY - 2001/10/21

Y1 - 2001/10/21

KW - METIS-200474

KW - IR-42138

M3 - Conference contribution

SN - 1-4020-0148-7

T3 - MESA monographs

SP - 381

EP - 382

BT - Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA

A2 - Ramsey, J. Michael

A2 - van den Berg, Albert

PB - Kluwer Academic Publishers

CY - Dordrecht/Boston/London

ER -