Fluorocarbon coated micromachined gas sampling device

B.H. Timmer, Johan G. Bomer, K.M. van Delft, R.P. Otjes, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA
    EditorsJ. Michael Ramsey, Albert van den Berg
    Place of PublicationDordrecht/Boston/London
    PublisherKluwer Academic Publishers
    Pages381-382
    Number of pages2
    ISBN (Print)1-4020-0148-7
    Publication statusPublished - 21 Oct 2001
    Event5th International Conference on Micro Total Analysis Systems, µTAS 2001 - Monterey, United States
    Duration: 21 Oct 200125 Oct 2001
    Conference number: 5

    Publication series

    NameMESA monographs

    Conference

    Conference5th International Conference on Micro Total Analysis Systems, µTAS 2001
    Abbreviated titleMicroTAS
    CountryUnited States
    CityMonterey
    Period21/10/0125/10/01

    Keywords

    • METIS-200474
    • IR-42138

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