Abstract
A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.
Original language | English |
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Title of host publication | Micro Total Analysis Systems 2001 |
Subtitle of host publication | Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001 |
Editors | J. Michael Ramsey, Albert van den Berg |
Place of Publication | Dordrecht |
Publisher | Kluwer Academic Publishers |
Pages | 381-382 |
Number of pages | 2 |
ISBN (Electronic) | 978-94-010-1015-3 |
ISBN (Print) | 978-1-4020-0148-2, 978-94-010-3893-5 |
DOIs | |
Publication status | Published - 21 Oct 2001 |
Event | 5th International Conference on Micro Total Analysis Systems, µTAS 2001 - Monterey, United States Duration: 21 Oct 2001 → 25 Oct 2001 Conference number: 5 |
Conference
Conference | 5th International Conference on Micro Total Analysis Systems, µTAS 2001 |
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Abbreviated title | MicroTAS |
Country/Territory | United States |
City | Monterey |
Period | 21/10/01 → 25/10/01 |
Keywords
- NLA