Fluorocarbon coated micromachined gas sampling device

B.H. Timmer, Johan G. Bomer, K.M. van Delft, R.P. Otjes, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA
    EditorsJ. Michael Ramsey, Albert van den Berg
    Place of PublicationDordrecht/Boston/London
    PublisherKluwer Academic Publishers
    Pages381-382
    Number of pages2
    ISBN (Print)1-4020-0148-7
    Publication statusPublished - 21 Oct 2001

    Publication series

    NameMESA monographs

    Keywords

    • METIS-200474
    • IR-42138

    Cite this

    Timmer, B. H., Bomer, J. G., van Delft, K. M., Otjes, R. P., Olthuis, W., & Bergveld, P. (2001). Fluorocarbon coated micromachined gas sampling device. In J. M. Ramsey, & A. van den Berg (Eds.), Proceedings of the MicroTAS 2001 Symposium, Monterey, CA, USA (pp. 381-382). (MESA monographs). Dordrecht/Boston/London: Kluwer Academic Publishers.