Fluorocarbon coated micromachined gas sampling device

B.H. Timmer; J.G. Bomer; K.M. van Delft; R.P. Otjes; W. Olthuis; P. Bergveld

doi:10.1007/978-94-010-1015-3_166

Fluorocarbon coated micromachined gas sampling device

B.H. Timmer, J.G. Bomer, K.M. van Delft, R.P. Otjes, W. Olthuis, P. Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.

Original language	English
Title of host publication	Micro Total Analysis Systems 2001
Subtitle of host publication	Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001
Editors	J. Michael Ramsey, Albert van den Berg
Place of Publication	Dordrecht
Publisher	Kluwer Academic Publishers
Pages	381-382
Number of pages	2
ISBN (Electronic)	978-94-010-1015-3
ISBN (Print)	978-1-4020-0148-2, 978-94-010-3893-5
DOIs	https://doi.org/10.1007/978-94-010-1015-3_166
Publication status	Published - 21 Oct 2001
Event	5th International Conference on Micro Total Analysis Systems, µTAS 2001 - Monterey, United States Duration: 21 Oct 2001 → 25 Oct 2001 Conference number: 5

Conference

Conference	5th International Conference on Micro Total Analysis Systems, µTAS 2001
Abbreviated title	MicroTAS
Country/Territory	United States
City	Monterey
Period	21/10/01 → 25/10/01

Keywords

NLA

Access to Document

10.1007/978-94-010-1015-3_166

Cite this

Timmer, B. H., Bomer, J. G., van Delft, K. M., Otjes, R. P., Olthuis, W., & Bergveld, P. (2001). Fluorocarbon coated micromachined gas sampling device. In J. M. Ramsey, & A. van den Berg (Eds.), Micro Total Analysis Systems 2001: Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001 (pp. 381-382). Kluwer Academic Publishers. https://doi.org/10.1007/978-94-010-1015-3_166

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title = "Fluorocarbon coated micromachined gas sampling device",

abstract = "A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.",

keywords = "NLA",

author = "B.H. Timmer and J.G. Bomer and {van Delft}, K.M. and R.P. Otjes and W. Olthuis and P. Bergveld",

year = "2001",

month = oct,

day = "21",

doi = "10.1007/978-94-010-1015-3_166",

language = "English",

isbn = "978-1-4020-0148-2",

pages = "381--382",

editor = "Ramsey, {J. Michael} and {van den Berg}, Albert",

booktitle = "Micro Total Analysis Systems 2001",

publisher = "Kluwer Academic Publishers",

address = "Netherlands",

note = "5th International Conference on Micro Total Analysis Systems, µTAS 2001, MicroTAS ; Conference date: 21-10-2001 Through 25-10-2001",

}

Timmer, BH, Bomer, JG, van Delft, KM, Otjes, RP, Olthuis, W & Bergveld, P 2001, Fluorocarbon coated micromachined gas sampling device. in JM Ramsey & A van den Berg (eds), Micro Total Analysis Systems 2001: Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001. Kluwer Academic Publishers, Dordrecht, pp. 381-382, 5th International Conference on Micro Total Analysis Systems, µTAS 2001, Monterey, California, United States, 21/10/01. https://doi.org/10.1007/978-94-010-1015-3_166

Fluorocarbon coated micromachined gas sampling device. / Timmer, B.H.; Bomer, J.G.; van Delft, K.M. et al.
Micro Total Analysis Systems 2001: Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001. ed. / J. Michael Ramsey; Albert van den Berg. Dordrecht: Kluwer Academic Publishers, 2001. p. 381-382.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fluorocarbon coated micromachined gas sampling device

AU - Timmer, B.H.

AU - Bomer, J.G.

AU - van Delft, K.M.

AU - Otjes, R.P.

AU - Olthuis, W.

AU - Bergveld, P.

N1 - Conference code: 5

PY - 2001/10/21

Y1 - 2001/10/21

N2 - A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.

AB - A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The membrane is rendered hydrophobic with a fluorocarbon coating. Bubble point and contact angle measurements have been performed on the membrane.

KW - NLA

U2 - 10.1007/978-94-010-1015-3_166

DO - 10.1007/978-94-010-1015-3_166

M3 - Conference contribution

SN - 978-1-4020-0148-2

SN - 978-94-010-3893-5

SP - 381

EP - 382

BT - Micro Total Analysis Systems 2001

A2 - Ramsey, J. Michael

A2 - van den Berg, Albert

PB - Kluwer Academic Publishers

CY - Dordrecht

T2 - 5th International Conference on Micro Total Analysis Systems, µTAS 2001

Y2 - 21 October 2001 through 25 October 2001

ER -

Timmer BH, Bomer JG, van Delft KM, Otjes RP, Olthuis W, Bergveld P. Fluorocarbon coated micromachined gas sampling device. In Ramsey JM, van den Berg A, editors, Micro Total Analysis Systems 2001: Proceedings of the µTAS 2001 Symposium, held in Monterey, CA, USA 21–25 October, 2001. Dordrecht: Kluwer Academic Publishers. 2001. p. 381-382 doi: 10.1007/978-94-010-1015-3_166

Fluorocarbon coated micromachined gas sampling device

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