Focused ion beam milling of three dimensional nanostructures with high precision

R.W. Tjerkstra; F.B. Segerink; J.J. Kelly; W.L. Vos

Focused ion beam milling of three dimensional nanostructures with high precision

R.W. Tjerkstra, F.B. Segerink, J.J. Kelly, W.L. Vos

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

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Abstract

The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. The work is published in J. Vac. Sci. Technol. B [1].

Original language	English
Title of host publication	Proceedings of the First International Workshop on FIB for Photonics
Subtitle of host publication	Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008
Editors	René M. de Ridder, Feridun Ay, Lasse J. Kauppinen
Place of Publication	Enschede, The Netherlands
Publisher	University of Twente
Pages	42-45
ISBN (Print)	9789036526784
Publication status	Published - Jun 2008
Event	1st International Workshop on FIB for Photonics 2008 - Eindhoven, Netherlands Duration: 13 Jun 2008 → 14 Jun 2008 Conference number: 1

Workshop

Workshop	1st International Workshop on FIB for Photonics 2008
Country/Territory	Netherlands
City	Eindhoven
Period	13/06/08 → 14/06/08

Keywords

EC Grant Agreement nr.: FP6/004525

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Tjerkstra, R. W., Segerink, F. B., Kelly, J. J., & Vos, W. L. (2008). Focused ion beam milling of three dimensional nanostructures with high precision. In R. M. de Ridder, F. Ay, & L. J. Kauppinen (Eds.), Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008 (pp. 42-45). University of Twente.

Tjerkstra, R.W. ; Segerink, F.B. ; Kelly, J.J. et al. / Focused ion beam milling of three dimensional nanostructures with high precision. Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008. editor / René M. de Ridder ; Feridun Ay ; Lasse J. Kauppinen. Enschede, The Netherlands : University of Twente, 2008. pp. 42-45

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abstract = "The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. The work is published in J. Vac. Sci. Technol. B [1].",

keywords = "EC Grant Agreement nr.: FP6/004525",

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pages = "42--45",

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booktitle = "Proceedings of the First International Workshop on FIB for Photonics",

publisher = "University of Twente",

address = "Netherlands",

note = "1st International Workshop on FIB for Photonics 2008 ; Conference date: 13-06-2008 Through 14-06-2008",

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Tjerkstra, RW, Segerink, FB, Kelly, JJ & Vos, WL 2008, Focused ion beam milling of three dimensional nanostructures with high precision. in RM de Ridder, F Ay & LJ Kauppinen (eds), Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008. University of Twente, Enschede, The Netherlands, pp. 42-45, 1st International Workshop on FIB for Photonics 2008, Eindhoven, Netherlands, 13/06/08.

Focused ion beam milling of three dimensional nanostructures with high precision. / Tjerkstra, R.W.; Segerink, F.B.; Kelly, J.J. et al.

Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008. ed. / René M. de Ridder; Feridun Ay; Lasse J. Kauppinen. Enschede, The Netherlands : University of Twente, 2008. p. 42-45.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

TY - CHAP

T1 - Focused ion beam milling of three dimensional nanostructures with high precision

AU - Tjerkstra, R.W.

AU - Segerink, F.B.

AU - Kelly, J.J.

AU - Vos, W.L.

N1 - Conference code: 1

PY - 2008/6

Y1 - 2008/6

N2 - The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. The work is published in J. Vac. Sci. Technol. B [1].

AB - The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. The work is published in J. Vac. Sci. Technol. B [1].

KW - EC Grant Agreement nr.: FP6/004525

M3 - Chapter

SN - 9789036526784

SP - 42

EP - 45

BT - Proceedings of the First International Workshop on FIB for Photonics

A2 - de Ridder, René M.

A2 - Ay, Feridun

A2 - Kauppinen, Lasse J.

PB - University of Twente

CY - Enschede, The Netherlands

T2 - 1st International Workshop on FIB for Photonics 2008

Y2 - 13 June 2008 through 14 June 2008

ER -

Tjerkstra RW, Segerink FB, Kelly JJ, Vos WL. Focused ion beam milling of three dimensional nanostructures with high precision. In de Ridder RM, Ay F, Kauppinen LJ, editors, Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008. Enschede, The Netherlands: University of Twente. 2008. p. 42-45

Focused ion beam milling of three dimensional nanostructures with high precision

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