The fabrication of an extended three-dimensional nanostructure with dimensions much larger than the feature size using a focused ion beam is described. By milling two identical patterns of pores with a designed diameter of 460 nm in orthogonal directions, a photonic crystal with an inverse woodpile structure was made in a gallium phosphide single crystal. The patterns are aligned with an unprecedented accuracy of 30 nm with respect to each other. The influence of GaP redeposition on the depth, shape, and size of the pores is described. The work is published in J. Vac. Sci. Technol. B .
|Title of host publication||Proceedings of the First International Workshop on FIB for Photonics|
|Subtitle of host publication||Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008|
|Editors||René M. de Ridder, Feridun Ay, Lasse J. Kauppinen|
|Place of Publication||Enschede, The Netherlands|
|Publisher||University of Twente|
|Publication status||Published - Jun 2008|
|Event||1st International Workshop on FIB for Photonics 2008 - Eindhoven, Netherlands|
Duration: 13 Jun 2008 → 14 Jun 2008
Conference number: 1
|Workshop||1st International Workshop on FIB for Photonics 2008|
|Period||13/06/08 → 14/06/08|
- EC Grant Agreement nr.: FP6/004525
Tjerkstra, R. W., Segerink, F. B., Kelly, J. J., & Vos, W. L. (2008). Focused ion beam milling of three dimensional nanostructures with high precision. In R. M. de Ridder, F. Ay, & L. J. Kauppinen (Eds.), Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008 (pp. 42-45). Enschede, The Netherlands: University of Twente.