Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

W.C.L. Hopman, F. Ay, Wenbin Hu, V.J. Gadgil, L. Kuipers, Markus Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

33 Downloads (Pure)

Abstract

We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.
Original languageUndefined
Title of host publicationProceedings European Conference on Integrated Optics (ECIO 2007)
Place of PublicationCopenhagen
PublisherTechnical University Denmark
PagesFA1-FA1/1
Number of pages4
ISBN (Print)not assigned
Publication statusPublished - Jun 2007
Event13th European Conference on Integrated Optics, ECIO 2007 - Copenhagen, Netherlands
Duration: 25 Apr 200727 Apr 2007
Conference number: 13

Publication series

Name
PublisherTechnical University Denmark

Conference

Conference13th European Conference on Integrated Optics, ECIO 2007
Abbreviated titleECIO
CountryNetherlands
CityCopenhagen
Period25/04/0727/04/07

Keywords

  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • IR-64359
  • METIS-245345
  • EWI-11098

Cite this