Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

W.C.L. Hopman, F. Ay, Wenbin Hu, V.J. Gadgil, L. Kuipers, Markus Pollnau, R.M. de Ridder

Abstract

We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.
Original languageUndefined
Title of host publicationProceedings European Conference on Integrated Optics (ECIO 2007)
Place of PublicationCopenhagen
PublisherTechnical University Denmark
PagesFA1-FA1/1
Number of pages4
ISBN (Print)not assigned
StatePublished - Jun 2007
Event13th European Conference on Integrated Optics, ECIO 2007 - Copenhagen, Netherlands

Publication series

Name
PublisherTechnical University Denmark

Conference

Conference13th European Conference on Integrated Optics, ECIO 2007
Abbreviated titleECIO
CountryNetherlands
CityCopenhagen
Period25/04/0727/04/07

Fingerprint

ion beams
optimization
scanning
tapering
ion implantation
slabs
photonics
annealing
silicon
geometry
crystals

Keywords

  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • IR-64359
  • METIS-245345
  • EWI-11098

Cite this

Hopman, W. C. L., Ay, F., Hu, W., Gadgil, V. J., Kuipers, L., Pollnau, M., & de Ridder, R. M. (2007). Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon. In Proceedings European Conference on Integrated Optics (ECIO 2007) (pp. FA1-FA1/1). Copenhagen: Technical University Denmark.

Hopman, W.C.L.; Ay, F.; Hu, Wenbin; Gadgil, V.J.; Kuipers, L.; Pollnau, Markus; de Ridder, R.M. / Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon.

Proceedings European Conference on Integrated Optics (ECIO 2007). Copenhagen : Technical University Denmark, 2007. p. FA1-FA1/1.

Research output: Scientific - peer-reviewConference contribution

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abstract = "We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.",
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Hopman, WCL, Ay, F, Hu, W, Gadgil, VJ, Kuipers, L, Pollnau, M & de Ridder, RM 2007, Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon. in Proceedings European Conference on Integrated Optics (ECIO 2007). Technical University Denmark, Copenhagen, pp. FA1-FA1/1, 13th European Conference on Integrated Optics, ECIO 2007, Copenhagen, Netherlands, 25-27 April.

Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon. / Hopman, W.C.L.; Ay, F.; Hu, Wenbin; Gadgil, V.J.; Kuipers, L.; Pollnau, Markus; de Ridder, R.M.

Proceedings European Conference on Integrated Optics (ECIO 2007). Copenhagen : Technical University Denmark, 2007. p. FA1-FA1/1.

Research output: Scientific - peer-reviewConference contribution

TY - CHAP

T1 - Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

AU - Hopman,W.C.L.

AU - Ay,F.

AU - Hu,Wenbin

AU - Gadgil,V.J.

AU - Kuipers,L.

AU - Pollnau,Markus

AU - de Ridder,R.M.

PY - 2007/6

Y1 - 2007/6

N2 - We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.

AB - We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

KW - IR-64359

KW - METIS-245345

KW - EWI-11098

M3 - Conference contribution

SN - not assigned

SP - FA1-FA1/1

BT - Proceedings European Conference on Integrated Optics (ECIO 2007)

PB - Technical University Denmark

ER -

Hopman WCL, Ay F, Hu W, Gadgil VJ, Kuipers L, Pollnau M et al. Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon. In Proceedings European Conference on Integrated Optics (ECIO 2007). Copenhagen: Technical University Denmark. 2007. p. FA1-FA1/1.