Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

W.C.L. Hopman; F. Ay; Wenbin Hu; V.J. Gadgil; L. Kuipers; Markus Pollnau; R.M. de Ridder

Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

W.C.L. Hopman
, F. Ay
, Wenbin Hu
, V.J. Gadgil
, L. Kuipers
, Markus Pollnau
, R.M. de Ridder

Optical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.

Original language	English
Title of host publication	Proceedings European Conference on Integrated Optics (ECIO 2007)
Place of Publication	Copenhagen
Publisher	Technical University Denmark
Pages	FA1-FA1/1
Number of pages	4
ISBN (Print)	not assigned
Publication status	Published - Jun 2007
Event	13th European Conference on Integrated Optics, ECIO 2007 - Copenhagen, Netherlands Duration: 25 Apr 2007 → 27 Apr 2007 Conference number: 13

Publication series

Name
Publisher	Technical University Denmark

Conference

Conference	13th European Conference on Integrated Optics, ECIO 2007
Abbreviated title	ECIO 2007
Country/Territory	Netherlands
City	Copenhagen
Period	25/04/07 → 27/04/07

Keywords

IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
IR-64359
METIS-245345
EWI-11098

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@inproceedings{847d08a1672046a18a9433b35c0b2803,

title = "Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon",

abstract = "We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of \$Ga\textasciicircum{}\{+\}\$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.",

keywords = "IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, IR-64359, METIS-245345, EWI-11098",

author = "W.C.L. Hopman and F. Ay and Wenbin Hu and V.J. Gadgil and L. Kuipers and Markus Pollnau and \{de Ridder\}, R.M.",

year = "2007",

month = jun,

language = "English",

isbn = "not assigned",

publisher = "Technical University Denmark",

pages = "FA1--FA1/1",

booktitle = "Proceedings European Conference on Integrated Optics (ECIO 2007)",

note = "13th European Conference on Integrated Optics, ECIO 2007, ECIO 2007 ; Conference date: 25-04-2007 Through 27-04-2007",

}

Hopman, WCL, Ay, F, Hu, W, Gadgil, VJ, Kuipers, L, Pollnau, M & de Ridder, RM 2007, Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon. in Proceedings European Conference on Integrated Optics (ECIO 2007). Technical University Denmark, Copenhagen, pp. FA1-FA1/1, 13th European Conference on Integrated Optics, ECIO 2007, Copenhagen, Netherlands, 25/04/07.

TY - GEN

T1 - Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

AU - Hopman, W.C.L.

AU - Ay, F.

AU - Hu, Wenbin

AU - Gadgil, V.J.

AU - Kuipers, L.

AU - Pollnau, Markus

AU - de Ridder, R.M.

N1 - Conference code: 13

PY - 2007/6

Y1 - 2007/6

N2 - We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.

AB - We report on optimisation of the side wall angle of focused ion beam (FIB) fabricated submicron diameter holes in silicon. Two optimisation steps were performed. First, we compare two different FIB scanning procedures and show the advantages of using a spiral scanning method for the definition of holes in photonic crystal slab structures. Secondly, we investigate the effect on the geometry, of parameters for reducing the tapering effect. Furthermore, we report on the initial results regarding effects of $Ga^{+}$ ion implantation during FIB milling on optical losses, both before and after an annealing step, showing over a decade reduction of optical loss.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

KW - IR-64359

KW - METIS-245345

KW - EWI-11098

M3 - Conference contribution

SN - not assigned

SP - FA1-FA1/1

BT - Proceedings European Conference on Integrated Optics (ECIO 2007)

PB - Technical University Denmark

CY - Copenhagen

T2 - 13th European Conference on Integrated Optics, ECIO 2007

Y2 - 25 April 2007 through 27 April 2007

ER -

Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

Abstract

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Keywords

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