Focused Ion Beam Milling Strategies of Photonic Crystal Structures in Silicon

W.C.L. Hopman, F. Ay, Wenbin Hu, V.J. Gadgil, L. Kuipers, Markus Pollnau, R.M. de Ridder

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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