Focused ion beam nano-structuring of Al2O3 dielectric layers for photonic applications

F. Ay, J. Bradley, W.C.L. Hopman, V.J. Gadgil, R.M. de Ridder, Kerstin Worhoff, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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