Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides

Feridun Ay, Amaia Uranga, Jonathan D.B. Bradley, Kerstin Worhoff, René M. de Ridder, Markus Pollnau

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    Abstract

    We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
    Original languageEnglish
    Title of host publicationProceedings of the First International Workshop on FIB for Photonics
    Subtitle of host publicationCollocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008
    EditorsRené M de Ridder, Feridun Ay, Lasse J. Kauppinen
    Place of PublicationEnschede, The Netherlands
    PublisherUniversity of Twente
    Pages48-50
    Number of pages3
    ISBN (Print)978-90-365-2678-4
    Publication statusPublished - 13 Jun 2008
    Event1st International Workshop on FIB for Photonics 2008 - Eindhoven, Netherlands
    Duration: 13 Jun 200814 Jun 2008
    Conference number: 1

    Workshop

    Workshop1st International Workshop on FIB for Photonics 2008
    CountryNetherlands
    CityEindhoven
    Period13/06/0814/06/08

    Keywords

    • EC Grant Agreement nr.: FP6/017501
    • IOMS-APD: Active Photonic Devices
    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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  • Cite this

    Ay, F., Uranga, A., Bradley, J. D. B., Worhoff, K., de Ridder, R. M., & Pollnau, M. (2008). Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides. In R. M. de Ridder, F. Ay, & L. J. Kauppinen (Eds.), Proceedings of the First International Workshop on FIB for Photonics: Collocated with the 14th European Conference on Integrated Optics (ECIO 2008), Eindhoven, the Netherlands, 13-14 June 2008 (pp. 48-50). Enschede, The Netherlands: University of Twente.