Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides

Amaia Uranga, J. Bradley, Kerstin Worhoff, Markus Pollnau

Abstract

We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
Original languageUndefined
Title of host publicationProceedings of the First Insternational Workshop on FIB for Photonics
EditorsR.M. de Ridder, R.M de Ridder, F. Ay, L.J. Kauppinen
Place of PublicationEnschede, The Netherlands
Pages48-50
Number of pages3
DOIs
StatePublished - 13 Jun 2008

Publication series

Name
PublisherUniversity of Twente
NumberWoTUG-31

Fingerprint

ion beams
dwell
ion currents
Bragg gratings
charging
repetition
gratings
waveguides
optimization
scanning
metals

Keywords

  • EC Grant Agreement nr.: FP6/017501
  • IOMS-APD: Active Photonic Devices
  • EWI-14297
  • METIS-254943
  • IR-65172
  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

Cite this

Uranga, A., Bradley, J., Worhoff, K., & Pollnau, M. (2008). Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides. In R. M. de Ridder, R. M. de Ridder, F. Ay, & L. J. Kauppinen (Eds.), Proceedings of the First Insternational Workshop on FIB for Photonics (pp. 48-50). Enschede, The Netherlands. DOI: 10.3990/1.9789036526784

Uranga, Amaia; Bradley, J.; Worhoff, Kerstin; Pollnau, Markus / Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides.

Proceedings of the First Insternational Workshop on FIB for Photonics. ed. / R.M. de Ridder; R.M de Ridder; F. Ay; L.J. Kauppinen. Enschede, The Netherlands, 2008. p. 48-50.

Research output: Scientific - peer-reviewConference contribution

@inbook{42a4af781f924d36a89579c4c8062c4f,
title = "Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides",
abstract = "We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.",
keywords = "EC Grant Agreement nr.: FP6/017501, IOMS-APD: Active Photonic Devices, EWI-14297, METIS-254943, IR-65172, IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES",
author = "Amaia Uranga and J. Bradley and Kerstin Worhoff and Markus Pollnau",
note = "10.3990/1.9789036526784",
year = "2008",
month = "6",
doi = "10.3990/1.9789036526784",
isbn = "978-90-365-2678-4",
publisher = "University of Twente",
number = "WoTUG-31",
pages = "48--50",
editor = "{de Ridder}, R.M. and {de Ridder}, R.M and F. Ay and L.J. Kauppinen",
booktitle = "Proceedings of the First Insternational Workshop on FIB for Photonics",

}

Uranga, A, Bradley, J, Worhoff, K & Pollnau, M 2008, Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides. in RM de Ridder, RM de Ridder, F Ay & LJ Kauppinen (eds), Proceedings of the First Insternational Workshop on FIB for Photonics. Enschede, The Netherlands, pp. 48-50. DOI: 10.3990/1.9789036526784

Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides. / Uranga, Amaia; Bradley, J.; Worhoff, Kerstin; Pollnau, Markus.

Proceedings of the First Insternational Workshop on FIB for Photonics. ed. / R.M. de Ridder; R.M de Ridder; F. Ay; L.J. Kauppinen. Enschede, The Netherlands, 2008. p. 48-50.

Research output: Scientific - peer-reviewConference contribution

TY - CHAP

T1 - Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides

AU - Uranga,Amaia

AU - Bradley,J.

AU - Worhoff,Kerstin

AU - Pollnau,Markus

N1 - 10.3990/1.9789036526784

PY - 2008/6/13

Y1 - 2008/6/13

N2 - We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.

AB - We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.

KW - EC Grant Agreement nr.: FP6/017501

KW - IOMS-APD: Active Photonic Devices

KW - EWI-14297

KW - METIS-254943

KW - IR-65172

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

U2 - 10.3990/1.9789036526784

DO - 10.3990/1.9789036526784

M3 - Conference contribution

SN - 978-90-365-2678-4

SP - 48

EP - 50

BT - Proceedings of the First Insternational Workshop on FIB for Photonics

ER -

Uranga A, Bradley J, Worhoff K, Pollnau M. Focused ion beam nano-structuring of Bragg gratings in Al2O3 channel waveguides. In de Ridder RM, de Ridder RM, Ay F, Kauppinen LJ, editors, Proceedings of the First Insternational Workshop on FIB for Photonics. Enschede, The Netherlands. 2008. p. 48-50. Available from, DOI: 10.3990/1.9789036526784