Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

F. Ay; D. Geskus; Ion Inurrategui; S. Aravazhi; V.J. Gadgil; Kerstin Worhoff; Markus Pollnau

Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb³⁺ Channel Waveguides

F. Ay, D. Geskus, Ion Inurrategui, S. Aravazhi, V.J. Gadgil, Kerstin Worhoff, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

Original language	Undefined
Title of host publication	Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter
Editors	J. Pozo, M. Mortensen, P. Urbach, X Leijtens, M. Yousefi
Place of Publication	Delft
Publisher	Uitgeverij TNO
Pages	265-268
Number of pages	4
ISBN (Print)	978-90-78314-15-8
Publication status	Published - 19 Nov 2010
Event	15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands Duration: 18 Nov 2010 → 19 Nov 2010 Conference number: 15

Publication series

Name
Publisher	Uitgeverij TNO

Conference

Conference	15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010
Country/Territory	Netherlands
City	Delft
Period	18/11/10 → 19/11/10

Keywords

IR-75722
EWI-19306
IOMS-APD: Active Photonic Devices
METIS-276752

Access to Document

http://eprints.eemcs.utwente.nl/secure2/19306/01/IEEE-Benelux_2010_Proceedings__FIB_KYW_Ay.pdf

Cite this

Ay, F., Geskus, D., Inurrategui, I., Aravazhi, S., Gadgil, V. J., Worhoff, K., & Pollnau, M. (2010). Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb³⁺ Channel Waveguides. In J. Pozo, M. Mortensen, P. Urbach, X. Leijtens, & M. Yousefi (Eds.), Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter (pp. 265-268). Uitgeverij TNO. http://eprints.eemcs.utwente.nl/secure2/19306/01/IEEE-Benelux_2010_Proceedings__FIB_KYW_Ay.pdf

@inproceedings{c60928bff26441c0a80747f26b0e5d79,

title = "Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides",

abstract = "We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.",

keywords = "IR-75722, EWI-19306, IOMS-APD: Active Photonic Devices, METIS-276752",

author = "F. Ay and D. Geskus and Ion Inurrategui and S. Aravazhi and V.J. Gadgil and Kerstin Worhoff and Markus Pollnau",

year = "2010",

month = nov,

day = "19",

language = "Undefined",

isbn = "978-90-78314-15-8",

publisher = "Uitgeverij TNO",

pages = "265--268",

editor = "J. Pozo and M. Mortensen and P. Urbach and X Leijtens and M. Yousefi",

booktitle = "Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter",

note = "15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 ; Conference date: 18-11-2010 Through 19-11-2010",

}

Ay, F, Geskus, D, Inurrategui, I, Aravazhi, S, Gadgil, VJ, Worhoff, K & Pollnau, M 2010, Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb³⁺ Channel Waveguides. in J Pozo, M Mortensen, P Urbach, X Leijtens & M Yousefi (eds), Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. Uitgeverij TNO, Delft, pp. 265-268, 15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010, Delft, Netherlands, 18/11/10. <http://eprints.eemcs.utwente.nl/secure2/19306/01/IEEE-Benelux_2010_Proceedings__FIB_KYW_Ay.pdf>

Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb³⁺ Channel Waveguides. / Ay, F.; Geskus, D.; Inurrategui, Ion et al.
Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. ed. / J. Pozo; M. Mortensen; P. Urbach; X Leijtens; M. Yousefi. Delft: Uitgeverij TNO, 2010. p. 265-268.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

AU - Ay, F.

AU - Geskus, D.

AU - Inurrategui, Ion

AU - Aravazhi, S.

AU - Gadgil, V.J.

AU - Worhoff, Kerstin

AU - Pollnau, Markus

N1 - Conference code: 15

PY - 2010/11/19

Y1 - 2010/11/19

N2 - We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

AB - We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

KW - IR-75722

KW - EWI-19306

KW - IOMS-APD: Active Photonic Devices

KW - METIS-276752

M3 - Conference contribution

SN - 978-90-78314-15-8

SP - 265

EP - 268

BT - Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter

A2 - Pozo, J.

A2 - Mortensen, M.

A2 - Urbach, P.

A2 - Leijtens, X

A2 - Yousefi, M.

PB - Uitgeverij TNO

CY - Delft

T2 - 15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010

Y2 - 18 November 2010 through 19 November 2010

ER -