Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

F. Ay, D. Geskus, Ion Inurrategui, S. Aravazhi, V.J. Gadgil, Kerstin Worhoff, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.
Original languageUndefined
Title of host publicationProceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter
EditorsJ. Pozo, M. Mortensen, P. Urbach, X Leijtens, M. Yousefi
Place of PublicationDelft
PublisherUitgeverij TNO
Pages265-268
Number of pages4
ISBN (Print)978-90-78314-15-8
Publication statusPublished - 19 Nov 2010
Event15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands
Duration: 18 Nov 201019 Nov 2010
Conference number: 15

Publication series

Name
PublisherUitgeverij TNO

Conference

Conference15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010
CountryNetherlands
CityDelft
Period18/11/1019/11/10

Keywords

  • IR-75722
  • EWI-19306
  • IOMS-APD: Active Photonic Devices
  • METIS-276752

Cite this

Ay, F., Geskus, D., Inurrategui, I., Aravazhi, S., Gadgil, V. J., Worhoff, K., & Pollnau, M. (2010). Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. In J. Pozo, M. Mortensen, P. Urbach, X. Leijtens, & M. Yousefi (Eds.), Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter (pp. 265-268). Delft: Uitgeverij TNO.
Ay, F. ; Geskus, D. ; Inurrategui, Ion ; Aravazhi, S. ; Gadgil, V.J. ; Worhoff, Kerstin ; Pollnau, Markus. / Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. editor / J. Pozo ; M. Mortensen ; P. Urbach ; X Leijtens ; M. Yousefi. Delft : Uitgeverij TNO, 2010. pp. 265-268
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title = "Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides",
abstract = "We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.",
keywords = "IR-75722, EWI-19306, IOMS-APD: Active Photonic Devices, METIS-276752",
author = "F. Ay and D. Geskus and Ion Inurrategui and S. Aravazhi and V.J. Gadgil and Kerstin Worhoff and Markus Pollnau",
year = "2010",
month = "11",
day = "19",
language = "Undefined",
isbn = "978-90-78314-15-8",
publisher = "Uitgeverij TNO",
pages = "265--268",
editor = "J. Pozo and M. Mortensen and P. Urbach and X Leijtens and M. Yousefi",
booktitle = "Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter",

}

Ay, F, Geskus, D, Inurrategui, I, Aravazhi, S, Gadgil, VJ, Worhoff, K & Pollnau, M 2010, Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. in J Pozo, M Mortensen, P Urbach, X Leijtens & M Yousefi (eds), Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. Uitgeverij TNO, Delft, pp. 265-268, 15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010, Delft, Netherlands, 18/11/10.

Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. / Ay, F.; Geskus, D.; Inurrategui, Ion; Aravazhi, S.; Gadgil, V.J.; Worhoff, Kerstin; Pollnau, Markus.

Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. ed. / J. Pozo; M. Mortensen; P. Urbach; X Leijtens; M. Yousefi. Delft : Uitgeverij TNO, 2010. p. 265-268.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

AU - Ay, F.

AU - Geskus, D.

AU - Inurrategui, Ion

AU - Aravazhi, S.

AU - Gadgil, V.J.

AU - Worhoff, Kerstin

AU - Pollnau, Markus

PY - 2010/11/19

Y1 - 2010/11/19

N2 - We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

AB - We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.

KW - IR-75722

KW - EWI-19306

KW - IOMS-APD: Active Photonic Devices

KW - METIS-276752

M3 - Conference contribution

SN - 978-90-78314-15-8

SP - 265

EP - 268

BT - Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter

A2 - Pozo, J.

A2 - Mortensen, M.

A2 - Urbach, P.

A2 - Leijtens, X

A2 - Yousefi, M.

PB - Uitgeverij TNO

CY - Delft

ER -

Ay F, Geskus D, Inurrategui I, Aravazhi S, Gadgil VJ, Worhoff K et al. Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. In Pozo J, Mortensen M, Urbach P, Leijtens X, Yousefi M, editors, Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter. Delft: Uitgeverij TNO. 2010. p. 265-268