Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

F. Ay, D. Geskus, Ion Inurrategui, S. Aravazhi, V.J. Gadgil, Kerstin Worhoff, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.
    Original languageUndefined
    Title of host publicationProceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter
    EditorsJ. Pozo, M. Mortensen, P. Urbach, X Leijtens, M. Yousefi
    Place of PublicationDelft
    PublisherUitgeverij TNO
    Number of pages4
    ISBN (Print)978-90-78314-15-8
    Publication statusPublished - 19 Nov 2010
    Event15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands
    Duration: 18 Nov 201019 Nov 2010
    Conference number: 15

    Publication series

    PublisherUitgeverij TNO


    Conference15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010


    • IR-75722
    • EWI-19306
    • IOMS-APD: Active Photonic Devices
    • METIS-276752

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