Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides

F. Ay, D. Geskus, Ion Inurrategui, S. Aravazhi, V.J. Gadgil, Kerstin Worhoff, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.
    Original languageUndefined
    Title of host publicationProceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter
    EditorsJ. Pozo, M. Mortensen, P. Urbach, X Leijtens, M. Yousefi
    Place of PublicationDelft
    PublisherUitgeverij TNO
    Pages265-268
    Number of pages4
    ISBN (Print)978-90-78314-15-8
    Publication statusPublished - 19 Nov 2010
    Event15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands
    Duration: 18 Nov 201019 Nov 2010
    Conference number: 15

    Publication series

    Name
    PublisherUitgeverij TNO

    Conference

    Conference15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010
    CountryNetherlands
    CityDelft
    Period18/11/1019/11/10

    Keywords

    • IR-75722
    • EWI-19306
    • IOMS-APD: Active Photonic Devices
    • METIS-276752

    Cite this

    Ay, F., Geskus, D., Inurrategui, I., Aravazhi, S., Gadgil, V. J., Worhoff, K., & Pollnau, M. (2010). Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides. In J. Pozo, M. Mortensen, P. Urbach, X. Leijtens, & M. Yousefi (Eds.), Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter (pp. 265-268). Delft: Uitgeverij TNO.