Focused-ion-beam processing for photonics

R.M. de Ridder, W.C.L. Hopman, F. Ay

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    9 Citations (Scopus)
    214 Downloads (Pure)

    Abstract

    Although focused ion beam (FIB) processing is a well-developed technology for many applications in electronics and physics, it has found limited application to photonics. Due to its very high spatial resolution in the order of 10 nm, and its ability to mill almost any material, it seems to have a good potential for fabricating or modifying nanophotonic structures such as photonic crystals. The two main issues are FIB-induced optical loss, e.g., due to implantation of gallium ions, and the definition of vertical sidewalls, which is affected by redeposition effects. The severity of the loss problem was found to depend on the base material, silicon being rather sensitive to this effect. The optical loss can be significantly reduced by annealing the processed samples. Changing the scanning strategy for the ion beam can both reduce the impact of gallium implantation and the redeposition effect.
    Original languageUndefined
    Title of host publication9th International Conference on Transparent Optical Networks, 2007. ICTON '07.
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Pages212-215
    Number of pages4
    ISBN (Print)1-4244-1249-8
    DOIs
    Publication statusPublished - Jul 2007
    Event9th International Conference on Transparent Optical Networks, ICTON 2007 - Rome, Italy
    Duration: 1 Jul 20075 Jul 2007
    Conference number: 9

    Publication series

    Name
    PublisherIEEE Computer Society Press
    Volume2

    Conference

    Conference9th International Conference on Transparent Optical Networks, ICTON 2007
    Abbreviated titleICTON
    CountryItaly
    CityRome
    Period1/07/075/07/07

    Keywords

    • EWI-13017
    • IOMS-APD: Active Photonic Devices
    • IR-64855
    • METIS-248730
    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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