Force characterization and analysis of thin film actuators for untethered microdevices

Frederico Ongaro*, Qianru Jin, Ugo Siciliani de Cumis, Arijit Ghosh, Alper Denasi, David H. Gracias, Sarthak Misra

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

    3 Citations (Scopus)
    37 Downloads (Pure)

    Abstract

    In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 μN, 4.7 μN, and 2.7 μN, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators.
    Original languageEnglish
    Article number055011
    JournalAIP advances
    Volume9
    Issue number5
    DOIs
    Publication statusPublished - 1 May 2019

    Keywords

    • Robotics
    • MEMS
    • Biomedical engineering
    • Nanofabrication

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  • Cite this

    Ongaro, F., Jin, Q., Siciliani de Cumis, U., Ghosh, A., Denasi, A., Gracias, D. H., & Misra, S. (2019). Force characterization and analysis of thin film actuators for untethered microdevices. AIP advances, 9(5), [055011]. https://doi.org/10.1063/1.5088779