Force characterization and analysis of thin film actuators for untethered microdevices

Frederico Ongaro*, Qianru Jin, Ugo Siciliani de Cumis, Arijit Ghosh, Alper Denasi, David H. Gracias, Sarthak Misra

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

    1 Citation (Scopus)
    16 Downloads (Pure)

    Abstract

    In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 μN, 4.7 μN, and 2.7 μN, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators.
    Original languageEnglish
    Article number055011
    JournalAIP advances
    Volume9
    Issue number5
    DOIs
    Publication statusPublished - 1 May 2019

    Fingerprint

    actuators
    thin films
    output
    robotics
    surgery
    microelectromechanical systems
    residual stress
    safety
    wire
    electromagnetism

    Keywords

    • Robotics
    • MEMS
    • Biomedical engineering
    • Nanofabrication

    Cite this

    Ongaro, F., Jin, Q., Siciliani de Cumis, U., Ghosh, A., Denasi, A., Gracias, D. H., & Misra, S. (2019). Force characterization and analysis of thin film actuators for untethered microdevices. AIP advances, 9(5), [055011]. https://doi.org/10.1063/1.5088779
    Ongaro, Frederico ; Jin, Qianru ; Siciliani de Cumis, Ugo ; Ghosh, Arijit ; Denasi, Alper ; Gracias, David H. ; Misra, Sarthak. / Force characterization and analysis of thin film actuators for untethered microdevices. In: AIP advances. 2019 ; Vol. 9, No. 5.
    @article{850816cd4120432f917b939846495234,
    title = "Force characterization and analysis of thin film actuators for untethered microdevices",
    abstract = "In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 μN, 4.7 μN, and 2.7 μN, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators.",
    keywords = "Robotics, MEMS, Biomedical engineering, Nanofabrication",
    author = "Frederico Ongaro and Qianru Jin and {Siciliani de Cumis}, Ugo and Arijit Ghosh and Alper Denasi and Gracias, {David H.} and Sarthak Misra",
    year = "2019",
    month = "5",
    day = "1",
    doi = "10.1063/1.5088779",
    language = "English",
    volume = "9",
    journal = "AIP advances",
    issn = "2158-3226",
    publisher = "American Institute of Physics",
    number = "5",

    }

    Ongaro, F, Jin, Q, Siciliani de Cumis, U, Ghosh, A, Denasi, A, Gracias, DH & Misra, S 2019, 'Force characterization and analysis of thin film actuators for untethered microdevices', AIP advances, vol. 9, no. 5, 055011. https://doi.org/10.1063/1.5088779

    Force characterization and analysis of thin film actuators for untethered microdevices. / Ongaro, Frederico; Jin, Qianru; Siciliani de Cumis, Ugo; Ghosh, Arijit; Denasi, Alper ; Gracias, David H.; Misra, Sarthak.

    In: AIP advances, Vol. 9, No. 5, 055011, 01.05.2019.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Force characterization and analysis of thin film actuators for untethered microdevices

    AU - Ongaro, Frederico

    AU - Jin, Qianru

    AU - Siciliani de Cumis, Ugo

    AU - Ghosh, Arijit

    AU - Denasi, Alper

    AU - Gracias, David H.

    AU - Misra, Sarthak

    PY - 2019/5/1

    Y1 - 2019/5/1

    N2 - In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 μN, 4.7 μN, and 2.7 μN, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators.

    AB - In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 μN, 4.7 μN, and 2.7 μN, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators.

    KW - Robotics

    KW - MEMS

    KW - Biomedical engineering

    KW - Nanofabrication

    UR - http://www.scopus.com/inward/record.url?scp=85065844393&partnerID=8YFLogxK

    U2 - 10.1063/1.5088779

    DO - 10.1063/1.5088779

    M3 - Article

    VL - 9

    JO - AIP advances

    JF - AIP advances

    SN - 2158-3226

    IS - 5

    M1 - 055011

    ER -

    Ongaro F, Jin Q, Siciliani de Cumis U, Ghosh A, Denasi A, Gracias DH et al. Force characterization and analysis of thin film actuators for untethered microdevices. AIP advances. 2019 May 1;9(5). 055011. https://doi.org/10.1063/1.5088779