Abstract
A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
Original language | Undefined |
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Title of host publication | 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) |
Place of Publication | USA |
Publisher | IEEE |
Pages | 2042-2045 |
Number of pages | 4 |
ISBN (Print) | 978-1-4577-0157-3 |
DOIs | |
Publication status | Published - 6 Jun 2011 |
Event | 16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/ |
Publication series
Name | 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 |
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Publisher | IEEE |
Volume | 16 |
Conference
Conference | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
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Abbreviated title | TRANSDUCERS 2011 |
Country/Territory | China |
City | Beijing |
Period | 5/06/11 → 9/06/11 |
Internet address |
Keywords
- IR-82632
- METIS-293158
- Micro machining
- Force sensor
- human interaction
- EWI-20795
- tactile robot
- capacitive sensing
- power transfer
- TST-SENSORS
- haptic