Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) |
| Place of Publication | USA |
| Publisher | IEEE |
| Pages | 2042-2045 |
| Number of pages | 4 |
| ISBN (Print) | 978-1-4577-0157-3 |
| DOIs | |
| Publication status | Published - 6 Jun 2011 |
| Event | 16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/ |
Publication series
| Name | 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 |
|---|---|
| Publisher | IEEE |
| Volume | 16 |
Conference
| Conference | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
|---|---|
| Abbreviated title | TRANSDUCERS 2011 |
| Country | China |
| City | Beijing |
| Period | 5/06/11 → 9/06/11 |
| Internet address |
Keywords
- IR-82632
- METIS-293158
- Micro machining
- Force sensor
- human interaction
- EWI-20795
- tactile robot
- capacitive sensing
- power transfer
- TST-SENSORS
- haptic
Cite this
}
Force sensor for measuring power transfer between the human body and the environment. / Brookhuis, Robert Anton; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; de Boer, Meint J.; Elwenspoek, Michael Curt.
16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. p. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Force sensor for measuring power transfer between the human body and the environment
AU - Brookhuis, Robert Anton
AU - Lammerink, Theodorus S.J.
AU - Wiegerink, Remco J.
AU - de Boer, Meint J.
AU - Elwenspoek, Michael Curt
N1 - 10.1109/TRANSDUCERS.2011.5969215
PY - 2011/6/6
Y1 - 2011/6/6
N2 - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
AB - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
KW - IR-82632
KW - METIS-293158
KW - Micro machining
KW - Force sensor
KW - human interaction
KW - EWI-20795
KW - tactile robot
KW - capacitive sensing
KW - power transfer
KW - TST-SENSORS
KW - haptic
U2 - 10.1109/TRANSDUCERS.2011.5969215
DO - 10.1109/TRANSDUCERS.2011.5969215
M3 - Conference contribution
SN - 978-1-4577-0157-3
T3 - 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
SP - 2042
EP - 2045
BT - 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
PB - IEEE
CY - USA
ER -