Force sensor for measuring power transfer between the human body and the environment

Robert Anton Brookhuis, Theodorus S.J. Lammerink, Remco J. Wiegerink, Meint J. de Boer, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
    Original languageUndefined
    Title of host publication16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
    Place of PublicationUSA
    PublisherIEEE
    Pages2042-2045
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 6 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
    PublisherIEEE
    Volume16

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • IR-82632
    • METIS-293158
    • Micro machining
    • Force sensor
    • human interaction
    • EWI-20795
    • tactile robot
    • capacitive sensing
    • power transfer
    • TST-SENSORS
    • haptic

    Cite this

    Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J., & Elwenspoek, M. C. (2011). Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 2042-2045). (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969215
    Brookhuis, Robert Anton ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; de Boer, Meint J. ; Elwenspoek, Michael Curt. / Force sensor for measuring power transfer between the human body and the environment. 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. pp. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011).
    @inproceedings{4fe0f44adfdd47d385f0f28e1854eb06,
    title = "Force sensor for measuring power transfer between the human body and the environment",
    abstract = "A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.",
    keywords = "IR-82632, METIS-293158, Micro machining, Force sensor, human interaction, EWI-20795, tactile robot, capacitive sensing, power transfer, TST-SENSORS, haptic",
    author = "Brookhuis, {Robert Anton} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and {de Boer}, {Meint J.} and Elwenspoek, {Michael Curt}",
    note = "10.1109/TRANSDUCERS.2011.5969215",
    year = "2011",
    month = "6",
    day = "6",
    doi = "10.1109/TRANSDUCERS.2011.5969215",
    language = "Undefined",
    isbn = "978-1-4577-0157-3",
    series = "16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011",
    publisher = "IEEE",
    pages = "2042--2045",
    booktitle = "16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)",
    address = "United States",

    }

    Brookhuis, RA, Lammerink, TSJ, Wiegerink, RJ, de Boer, MJ & Elwenspoek, MC 2011, Force sensor for measuring power transfer between the human body and the environment. in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, vol. 16, IEEE, USA, pp. 2042-2045, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969215

    Force sensor for measuring power transfer between the human body and the environment. / Brookhuis, Robert Anton; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; de Boer, Meint J.; Elwenspoek, Michael Curt.

    16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. p. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Force sensor for measuring power transfer between the human body and the environment

    AU - Brookhuis, Robert Anton

    AU - Lammerink, Theodorus S.J.

    AU - Wiegerink, Remco J.

    AU - de Boer, Meint J.

    AU - Elwenspoek, Michael Curt

    N1 - 10.1109/TRANSDUCERS.2011.5969215

    PY - 2011/6/6

    Y1 - 2011/6/6

    N2 - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

    AB - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

    KW - IR-82632

    KW - METIS-293158

    KW - Micro machining

    KW - Force sensor

    KW - human interaction

    KW - EWI-20795

    KW - tactile robot

    KW - capacitive sensing

    KW - power transfer

    KW - TST-SENSORS

    KW - haptic

    U2 - 10.1109/TRANSDUCERS.2011.5969215

    DO - 10.1109/TRANSDUCERS.2011.5969215

    M3 - Conference contribution

    SN - 978-1-4577-0157-3

    T3 - 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011

    SP - 2042

    EP - 2045

    BT - 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)

    PB - IEEE

    CY - USA

    ER -

    Brookhuis RA, Lammerink TSJ, Wiegerink RJ, de Boer MJ, Elwenspoek MC. Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA: IEEE. 2011. p. 2042-2045. (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011). https://doi.org/10.1109/TRANSDUCERS.2011.5969215