Force sensor for measuring power transfer between the human body and the environment

Robert Anton Brookhuis, Theodorus S.J. Lammerink, Remco J. Wiegerink, Meint J. de Boer, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
    Original languageUndefined
    Title of host publication16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
    Place of PublicationUSA
    PublisherIEEE
    Pages2042-2045
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 6 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
    PublisherIEEE
    Volume16

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • IR-82632
    • METIS-293158
    • Micro machining
    • Force sensor
    • human interaction
    • EWI-20795
    • tactile robot
    • capacitive sensing
    • power transfer
    • TST-SENSORS
    • haptic

    Cite this

    Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J., & Elwenspoek, M. C. (2011). Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 2042-2045). (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969215