Force sensor for measuring power transfer between the human body and the environment

Robert Anton Brookhuis; Theodorus S.J. Lammerink; Remco J. Wiegerink; Meint J. de Boer; Michael Curt Elwenspoek

doi:10.1109/TRANSDUCERS.2011.5969215

Force sensor for measuring power transfer between the human body and the environment

Robert Anton Brookhuis, Theodorus S.J. Lammerink, Remco J. Wiegerink, Meint J. de Boer, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

1 Downloads (Pure)

Abstract

A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

Original language	Undefined
Title of host publication	16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
Place of Publication	USA
Publisher	IEEE
Pages	2042-2045
Number of pages	4
ISBN (Print)	978-1-4577-0157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969215
Publication status	Published - 6 Jun 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/

Publication series

Name	16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
Publisher	IEEE
Volume	16

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated title	TRANSDUCERS 2011
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11
Internet address	http://transducers11-beijing.org/

Keywords

IR-82632
METIS-293158
Micro machining
Force sensor
human interaction
EWI-20795
tactile robot
capacitive sensing
power transfer
TST-SENSORS
haptic

Access to Document

10.1109/TRANSDUCERS.2011.5969215

http://eprints.eemcs.utwente.nl/secure2/20795/01/05969215.pdf

Cite this

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J., & Elwenspoek, M. C. (2011). Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 2042-2045). (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16). IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969215

Brookhuis, Robert Anton ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. et al. / Force sensor for measuring power transfer between the human body and the environment. 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. pp. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011).

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abstract = "A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.",

keywords = "IR-82632, METIS-293158, Micro machining, Force sensor, human interaction, EWI-20795, tactile robot, capacitive sensing, power transfer, TST-SENSORS, haptic",

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doi = "10.1109/TRANSDUCERS.2011.5969215",

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Brookhuis, RA, Lammerink, TSJ , Wiegerink, RJ, de Boer, MJ & Elwenspoek, MC 2011, Force sensor for measuring power transfer between the human body and the environment. in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, vol. 16, IEEE, USA, pp. 2042-2045, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969215

Force sensor for measuring power transfer between the human body and the environment. / Brookhuis, Robert Anton; Lammerink, Theodorus S.J.; Wiegerink, Remco J. et al.

16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. p. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

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Brookhuis RA, Lammerink TSJ , Wiegerink RJ, de Boer MJ, Elwenspoek MC. Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA: IEEE. 2011. p. 2042-2045. (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011). doi: 10.1109/TRANSDUCERS.2011.5969215