Force sensor for measuring power transfer between the human body and the environment

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
1 Downloads (Pure)

Abstract

A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.
Original languageUndefined
Title of host publication16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
Place of PublicationUSA
PublisherIEEE
Pages2042-2045
Number of pages4
ISBN (Print)978-1-4577-0157-3
DOIs
Publication statusPublished - 6 Jun 2011
Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
Duration: 5 Jun 20119 Jun 2011
Conference number: 16
http://transducers11-beijing.org/

Publication series

Name16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
PublisherIEEE
Volume16

Conference

Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated titleTRANSDUCERS 2011
CountryChina
CityBeijing
Period5/06/119/06/11
Internet address

Keywords

  • IR-82632
  • METIS-293158
  • Micro machining
  • Force sensor
  • human interaction
  • EWI-20795
  • tactile robot
  • capacitive sensing
  • power transfer
  • TST-SENSORS
  • haptic

Cite this

Brookhuis, R. A., Lammerink, T. S. J., Wiegerink, R. J., de Boer, M. J., & Elwenspoek, M. C. (2011). Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011) (pp. 2042-2045). (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16). USA: IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969215
Brookhuis, Robert Anton ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; de Boer, Meint J. ; Elwenspoek, Michael Curt. / Force sensor for measuring power transfer between the human body and the environment. 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. pp. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011).
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title = "Force sensor for measuring power transfer between the human body and the environment",
abstract = "A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.",
keywords = "IR-82632, METIS-293158, Micro machining, Force sensor, human interaction, EWI-20795, tactile robot, capacitive sensing, power transfer, TST-SENSORS, haptic",
author = "Brookhuis, {Robert Anton} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and {de Boer}, {Meint J.} and Elwenspoek, {Michael Curt}",
note = "10.1109/TRANSDUCERS.2011.5969215",
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Brookhuis, RA, Lammerink, TSJ, Wiegerink, RJ, de Boer, MJ & Elwenspoek, MC 2011, Force sensor for measuring power transfer between the human body and the environment. in 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, vol. 16, IEEE, USA, pp. 2042-2045, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969215

Force sensor for measuring power transfer between the human body and the environment. / Brookhuis, Robert Anton; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; de Boer, Meint J.; Elwenspoek, Michael Curt.

16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA : IEEE, 2011. p. 2042-2045 (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011; Vol. 16).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Force sensor for measuring power transfer between the human body and the environment

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AU - Lammerink, Theodorus S.J.

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AU - Elwenspoek, Michael Curt

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N2 - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

AB - A force sensor with capacitive readout is designed and realized for the measurement of mechanical power transfer. The ultimate aim is to integrate this in a glove that determines the complete mechanical interaction between the human hand and the environment. The sensor measures the normal force and two perpendicular moments so that it can compensate for asymmetric loads. The fabrication process is based on silicon fusion bonding and allows the realization of extremely small gaps (250 nm). This, in combination with mechanical amplification due to the sensor structure, results in a large sensitivity of 16 pF/N and a full-scale range of 50 N.

KW - IR-82632

KW - METIS-293158

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KW - Force sensor

KW - human interaction

KW - EWI-20795

KW - tactile robot

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T3 - 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011

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Brookhuis RA, Lammerink TSJ, Wiegerink RJ, de Boer MJ, Elwenspoek MC. Force sensor for measuring power transfer between the human body and the environment. In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011). USA: IEEE. 2011. p. 2042-2045. (16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011). https://doi.org/10.1109/TRANSDUCERS.2011.5969215