Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam; E. van Veenendaal; H. Cuppen; J. van Suchtelen; M.L. Reed; Johannes G.E. Gardeniers; W.J.P. van Enckevort; E. Vlieg; Michael Curt Elwenspoek

Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Toulouse, France
Publication status	Published - 15 May 2000

Keywords

METIS-114833

Cite this

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title = "Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation",

keywords = "METIS-114833",

author = "A.J. Nijdam and {van Veenendaal}, E. and H. Cuppen and {van Suchtelen}, J. and M.L. Reed and Gardeniers, {Johannes G.E.} and {van Enckevort}, W.J.P. and E. Vlieg and Elwenspoek, {Michael Curt}",

year = "2000",

month = may,

day = "15",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

AU - Nijdam, A.J.

AU - van Veenendaal, E.

AU - Cuppen, H.

AU - van Suchtelen, J.

AU - Reed, M.L.

AU - Gardeniers, Johannes G.E.

AU - van Enckevort, W.J.P.

AU - Vlieg, E.

AU - Elwenspoek, Michael Curt

PY - 2000/5/15

Y1 - 2000/5/15

KW - METIS-114833

M3 - Other contribution

CY - Toulouse, France

ER -