Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationToulouse, France
    Publication statusPublished - 15 May 2000

    Keywords

    • METIS-114833

    Cite this

    Nijdam, A.J. ; van Veenendaal, E. ; Cuppen, H. ; van Suchtelen, J. ; Reed, M.L. ; Gardeniers, Johannes G.E. ; van Enckevort, W.J.P. ; Vlieg, E. ; Elwenspoek, Michael Curt. / Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation. 2000. Toulouse, France.
    @misc{583d08ef8bff42219eea8b152a595e3e,
    title = "Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation",
    keywords = "METIS-114833",
    author = "A.J. Nijdam and {van Veenendaal}, E. and H. Cuppen and {van Suchtelen}, J. and M.L. Reed and Gardeniers, {Johannes G.E.} and {van Enckevort}, W.J.P. and E. Vlieg and Elwenspoek, {Michael Curt}",
    year = "2000",
    month = "5",
    day = "15",
    language = "Undefined",
    type = "Other",

    }

    Nijdam, AJ, van Veenendaal, E, Cuppen, H, van Suchtelen, J, Reed, ML, Gardeniers, JGE, van Enckevort, WJP, Vlieg, E & Elwenspoek, MC 2000, Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation. Toulouse, France.

    Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation. / Nijdam, A.J.; van Veenendaal, E.; Cuppen, H.; van Suchtelen, J.; Reed, M.L.; Gardeniers, Johannes G.E.; van Enckevort, W.J.P.; Vlieg, E.; Elwenspoek, Michael Curt.

    Toulouse, France. 2000, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

    AU - Nijdam, A.J.

    AU - van Veenendaal, E.

    AU - Cuppen, H.

    AU - van Suchtelen, J.

    AU - Reed, M.L.

    AU - Gardeniers, Johannes G.E.

    AU - van Enckevort, W.J.P.

    AU - Vlieg, E.

    AU - Elwenspoek, Michael Curt

    PY - 2000/5/15

    Y1 - 2000/5/15

    KW - METIS-114833

    M3 - Other contribution

    CY - Toulouse, France

    ER -