Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationToulouse, France
    Publication statusPublished - 15 May 2000

    Keywords

    • METIS-114833

    Cite this

    Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., ... Elwenspoek, M. C. (2000, May 15). Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation. Toulouse, France.