Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam; E. van Veenendaal; H. Cuppen; J. van Suchtelen; M.L. Reed; Johannes G.E. Gardeniers; W.J.P. van Enckevort; E. Vlieg; Michael Curt Elwenspoek

Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

A.J. Nijdam
, E. van Veenendaal
, H. Cuppen
, J. van Suchtelen
, M.L. Reed
, Johannes G.E. Gardeniers
, W.J.P. van Enckevort
, E. Vlieg
, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Toulouse, France
Publication status	Published - 15 May 2000

Keywords

METIS-114833

Cite this

@misc{583d08ef8bff42219eea8b152a595e3e,

title = "Formation and stabilisation of pyramidal etching hillocks on silicon \{100\} in anisotropic etchants: experimental observations and Monte Carlo simulation",

keywords = "METIS-114833",

author = "A.J. Nijdam and \{van Veenendaal\}, E. and H. Cuppen and \{van Suchtelen\}, J. and M.L. Reed and Gardeniers, \{Johannes G.E.\} and \{van Enckevort\}, W.J.P. and E. Vlieg and Elwenspoek, \{Michael Curt\}",

year = "2000",

month = may,

day = "15",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - Formation and stabilisation of pyramidal etching hillocks on silicon {100} in anisotropic etchants: experimental observations and Monte Carlo simulation

AU - Nijdam, A.J.

AU - van Veenendaal, E.

AU - Cuppen, H.

AU - van Suchtelen, J.

AU - Reed, M.L.

AU - Gardeniers, Johannes G.E.

AU - van Enckevort, W.J.P.

AU - Vlieg, E.

AU - Elwenspoek, Michael Curt

PY - 2000/5/15

Y1 - 2000/5/15

KW - METIS-114833

M3 - Other contribution

CY - Toulouse, France

ER -