Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 12 Oct 2000


    • METIS-114828

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