Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory

A.J. Nijdam; E. van Veenendaal; H. Cuppen; J. van Suchtelen; M.L. Reed; Johannes G.E. Gardeniers; W.J.P. van Enckevort; E. Vlieg; Michael Curt Elwenspoek

Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 12 Oct 2000

Keywords

METIS-114828

Cite this

@misc{cf37cde51ba74a7eb89a403c352d5a1a,

title = "Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory",

keywords = "METIS-114828",

author = "A.J. Nijdam and {van Veenendaal}, E. and H. Cuppen and {van Suchtelen}, J. and M.L. Reed and Gardeniers, {Johannes G.E.} and {van Enckevort}, W.J.P. and E. Vlieg and Elwenspoek, {Michael Curt}",

year = "2000",

month = oct,

day = "12",

language = "Undefined",

type = "Other",

}

TY - GEN

T1 - Formation and stabilitation of pyramidal etching hillocks: experimental observations, Monte Carlo simulation and theory

AU - Nijdam, A.J.

AU - van Veenendaal, E.

AU - Cuppen, H.

AU - van Suchtelen, J.

AU - Reed, M.L.

AU - Gardeniers, Johannes G.E.

AU - van Enckevort, W.J.P.

AU - Vlieg, E.

AU - Elwenspoek, Michael Curt

PY - 2000/10/12

Y1 - 2000/10/12

KW - METIS-114828

M3 - Other contribution

CY - Enschede

ER -