Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation

A.J. Nijdam, E. van Veenendaal, H. Cuppen, J. van Suchtelen, M.L. Reed, Johannes G.E. Gardeniers, W.J.P. van Enckevort, E. Vlieg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of MicroMechanics Europe (MME) 2000
Place of PublicationUppsala, Sweden
Pages-
Number of pages3
Publication statusPublished - 1 Oct 2000
Event11th MicroMechanics Europe Workshop, MME 2000 - Uppsala, Sweden
Duration: 1 Oct 20003 Oct 2000
Conference number: 11

Conference

Conference11th MicroMechanics Europe Workshop, MME 2000
Abbreviated titleMME
CountrySweden
CityUppsala
Period1/10/003/10/00

Keywords

  • METIS-113076
  • IR-16191

Cite this

Nijdam, A. J., van Veenendaal, E., Cuppen, H., van Suchtelen, J., Reed, M. L., Gardeniers, J. G. E., ... Elwenspoek, M. C. (2000). Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. In Proceedings of MicroMechanics Europe (MME) 2000 (pp. -). Uppsala, Sweden.