Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

Nhu Toan Nguyen, N.D. Chien, J. Holleman, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE (CD-ROM)
    Place of PublicationMierlo, the Netherlands
    Pages-
    Number of pages6
    Publication statusPublished - 25 Nov 1998

    Keywords

    • METIS-113847

    Cite this

    Nguyen, N. T., Chien, N. D., Holleman, J., & Woerlee, P. H. (1998). Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. In Proceedings of the SAFE (CD-ROM) (pp. -). Mierlo, the Netherlands.
    Nguyen, Nhu Toan ; Chien, N.D. ; Holleman, J. ; Woerlee, P.H. / Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. Proceedings of the SAFE (CD-ROM). Mierlo, the Netherlands, 1998. pp. -
    @inproceedings{39137cb9228b43ceb1fe80f89215fae3,
    title = "Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass",
    keywords = "METIS-113847",
    author = "Nguyen, {Nhu Toan} and N.D. Chien and J. Holleman and P.H. Woerlee",
    year = "1998",
    month = "11",
    day = "25",
    language = "Undefined",
    isbn = "90-73461-15-4",
    pages = "--",
    booktitle = "Proceedings of the SAFE (CD-ROM)",

    }

    Nguyen, NT, Chien, ND, Holleman, J & Woerlee, PH 1998, Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. in Proceedings of the SAFE (CD-ROM). Mierlo, the Netherlands, pp. -.

    Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. / Nguyen, Nhu Toan; Chien, N.D.; Holleman, J.; Woerlee, P.H.

    Proceedings of the SAFE (CD-ROM). Mierlo, the Netherlands, 1998. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

    AU - Nguyen, Nhu Toan

    AU - Chien, N.D.

    AU - Holleman, J.

    AU - Woerlee, P.H.

    PY - 1998/11/25

    Y1 - 1998/11/25

    KW - METIS-113847

    M3 - Conference contribution

    SN - 90-73461-15-4

    SP - -

    BT - Proceedings of the SAFE (CD-ROM)

    CY - Mierlo, the Netherlands

    ER -

    Nguyen NT, Chien ND, Holleman J, Woerlee PH. Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. In Proceedings of the SAFE (CD-ROM). Mierlo, the Netherlands. 1998. p. -