Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

Nhu Toan Nguyen, N.D. Chien, J. Holleman, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE (CD-ROM)
    Place of PublicationMierlo, the Netherlands
    Pages-
    Number of pages6
    Publication statusPublished - 25 Nov 1998

    Keywords

    • METIS-113847

    Cite this

    Nguyen, N. T., Chien, N. D., Holleman, J., & Woerlee, P. H. (1998). Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. In Proceedings of the SAFE (CD-ROM) (pp. -). Mierlo, the Netherlands.