Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

Nhu Toan Nguyen, N.D. Chien, J. Holleman, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE (CD-ROM)
    Place of PublicationMierlo, the Netherlands
    Number of pages6
    Publication statusPublished - 25 Nov 1998


    • METIS-113847

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