Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

Nhu Toan Nguyen, N.D. Chien, J. Holleman, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the SAFE (CD-ROM)
Place of Publication	Mierlo, the Netherlands
Pages	-
Number of pages	6
Publication status	Published - 25 Nov 1998

Keywords

@inproceedings{39137cb9228b43ceb1fe80f89215fae3,

title = "Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass",

keywords = "METIS-113847",

author = "Nguyen, {Nhu Toan} and N.D. Chien and J. Holleman and P.H. Woerlee",

year = "1998",

month = nov,

day = "25",

language = "Undefined",

isbn = "90-73461-15-4",

pages = "--",

booktitle = "Proceedings of the SAFE (CD-ROM)",

}