Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

N.T. Nguyen; N.D. Chien; J. Holleman; P.H. Woerlee

Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

N.T. Nguyen
, N.D. Chien
, J. Holleman
, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98
Subtitle of host publication	Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics"
Place of Publication	Mierlo, the Netherlands
Publisher	STW
Number of pages	6
Edition	CD-ROM
ISBN (Print)	90-73461-14-6
Publication status	Published - 25 Nov 1998
Event	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 1998 - Mierlo, Netherlands Duration: 25 Nov 1998 → 27 Nov 1998

Conference

Conference	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 1998
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Mierlo
Period	25/11/98 → 27/11/98

Cite this

Nguyen, N. T., Chien, N. D., Holleman, J., & Woerlee, P. H. (1998). Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. In Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98: Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics" (CD-ROM ed.). STW.

Nguyen, N.T. ; Chien, N.D. ; Holleman, J. et al. / Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98: Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics". CD-ROM. ed. Mierlo, the Netherlands : STW, 1998.

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title = "Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass",

author = "N.T. Nguyen and N.D. Chien and J. Holleman and P.H. Woerlee",

year = "1998",

month = nov,

day = "25",

language = "English",

isbn = "90-73461-14-6",

booktitle = "Proceedings ProRISC/IEEE's CSSP98 \& STW's SAFE98",

publisher = "STW",

edition = "CD-ROM",

note = "Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 1998, SAFE ; Conference date: 25-11-1998 Through 27-11-1998",

}

Nguyen, NT, Chien, ND, Holleman, J & Woerlee, PH 1998, Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. in Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98: Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics". CD-ROM edn, STW, Mierlo, the Netherlands, Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 1998, Mierlo, Netherlands, 25/11/98.

Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. / Nguyen, N.T.; Chien, N.D.; Holleman, J. et al.
Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98: Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics". CD-ROM. ed. Mierlo, the Netherlands: STW, 1998.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass

AU - Nguyen, N.T.

AU - Chien, N.D.

AU - Holleman, J.

AU - Woerlee, P.H.

PY - 1998/11/25

Y1 - 1998/11/25

M3 - Conference contribution

SN - 90-73461-14-6

BT - Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98

PB - STW

CY - Mierlo, the Netherlands

T2 - Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 1998

Y2 - 25 November 1998 through 27 November 1998

ER -

Nguyen NT, Chien ND, Holleman J, Woerlee PH. Formation of Shallow Junctions by Dopant Diffusion from Spin-On Glass. In Proceedings ProRISC/IEEE's CSSP98 & STW's SAFE98: Proceedings of the 9th Annual Workshop on "Circuits, Systems and Signal Processing" and the 1st Annual Workshop on "Semiconductor Advances for Future Electronics". CD-ROM ed. Mierlo, the Netherlands: STW. 1998