Formation of Source and Drain Regions for a-Si: H TFT by Using Ion Implantation Through Metal Technique

Van Hieu Nguyen, A.R. Merticaru, R. Dekker, H. van Kranenburg, A.J. Mouthaan, N.D. Chien

Research output: Other contribution › Other research output

Keywords

@misc{ff80cde7b9b24c73891c4a8d44988878,

title = "Formation of Source and Drain Regions for a-Si: H TFT by Using Ion Implantation Through Metal Technique",

keywords = "METIS-114850",

author = "Nguyen, {Van Hieu} and A.R. Merticaru and R. Dekker and {van Kranenburg}, H. and A.J. Mouthaan and N.D. Chien",

year = "1999",

month = nov,

day = "24",

language = "Undefined",

type = "Other",

}