Formation of thin oxide films by metal-organic chemical vapour deposition

V.A.C. Haanappel, H.D. van Corbach, R. Hofman, R.W.J. Morsinkhof, T. Fransen, P.J. Gellings

Research output: Contribution to journalArticleAcademic

14 Citations (Scopus)
Original languageUndefined
Pages (from-to)245-262
Number of pages18
JournalHigh temperature materials and processes
Issue number4
Publication statusPublished - 1996


  • METIS-105520

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