Formation of thin oxide films by metal-organic chemical vapour deposition

V.A.C. Haanappel, H.D. van Corbach, R. Hofman, R.W.J. Morsinkhof, T. Fransen, P.J. Gellings

Research output: Contribution to journalArticleAcademic

13 Citations (Scopus)
Original languageUndefined
Pages (from-to)245-262
Number of pages18
JournalHigh temperature materials and processes
Volume15
Issue number4
Publication statusPublished - 1996

Keywords

  • METIS-105520

Cite this

Haanappel, V. A. C., van Corbach, H. D., Hofman, R., Morsinkhof, R. W. J., Fransen, T., & Gellings, P. J. (1996). Formation of thin oxide films by metal-organic chemical vapour deposition. High temperature materials and processes, 15(4), 245-262.