Test structures for the electrical characterization of ultrathin conductive films are presented based on electrodes on which the ultrathin film is deposited. Two different designs are discussed: a novel design with buried electrodes and a conventional design with electrodes at the surface. This work includes test structure design and fabrication, and the electrical characterization of ALD TiN films down to 4 nm. We demonstrate that the novel test structures provide the same results as the conventional structures, and have the advantage of broader materials choice (i.e. conductor-dielectric combination). The proposed structures can be used successfully to characterize sub 10 nm films.
Groenland, A. W., Wolters, R. A. M., Kovalgin, A. Y., & Schmitz, J. (2012). Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE transactions on semiconductor manufacturing, 25(2), 178-184. https://doi.org/10.1109/TSM.2011.2181674