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Fracture Toughness of Free-Standing ZrSiₓ Thin Films Measured Using Crack-on-a-Chip Method
Airat Shafikov*, Robbert W.E. van de Kruijs, Jos P.H. Benschop, Wesley van den Beld, Silvester Houweling, F. Bijkerk
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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