Abstract
In this paper, a novel fabrication method is proposed for microfluidic tubes with a large diameter, circular cross-section, and thin wall. These properties make the tubes
especially suitable for density sensors and Coriolis mass flow sensors, because of the resulting low tube mass, low-pressure drop, and low pressure-dependence of the tube shape. A demonstrator sensor was fabricated and the first measurement results of fluid density and mass flow are presented. The low-cost fabrication method is based on electroplating technology and results in tubes with a near-perfect circular cross-section. Diameters ranging from 120 µm to 1 mm and wall thicknesses from 8 µm to 60 µm
have been achieved. For the demonstrator sensor presented in this paper a freely suspended tube was realized with a total length of 37 mm, a diameter of 600 µm, and a wall
thickness of 20 µm. Density measurements were performed using various gases, liquids, and liquid mixtures at 21◦C to 23◦C lab temperature. The accuracy of the measured densities of gases such as nitrogen, argon, and helium is 5%. For liquids including DI water, isopropyl alcohol (IPA), and their various mixtures an accuracy of 0.5% was obtained. Preliminary mass flow rate measurements were performed with water and isopropyl alcohol up to 30 g/h with less than 30 mbar pressure drop thanks to the large tube diameter.
especially suitable for density sensors and Coriolis mass flow sensors, because of the resulting low tube mass, low-pressure drop, and low pressure-dependence of the tube shape. A demonstrator sensor was fabricated and the first measurement results of fluid density and mass flow are presented. The low-cost fabrication method is based on electroplating technology and results in tubes with a near-perfect circular cross-section. Diameters ranging from 120 µm to 1 mm and wall thicknesses from 8 µm to 60 µm
have been achieved. For the demonstrator sensor presented in this paper a freely suspended tube was realized with a total length of 37 mm, a diameter of 600 µm, and a wall
thickness of 20 µm. Density measurements were performed using various gases, liquids, and liquid mixtures at 21◦C to 23◦C lab temperature. The accuracy of the measured densities of gases such as nitrogen, argon, and helium is 5%. For liquids including DI water, isopropyl alcohol (IPA), and their various mixtures an accuracy of 0.5% was obtained. Preliminary mass flow rate measurements were performed with water and isopropyl alcohol up to 30 g/h with less than 30 mbar pressure drop thanks to the large tube diameter.
Original language | English |
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Pages (from-to) | 408-414 |
Number of pages | 7 |
Journal | Journal of microelectromechanical systems |
Volume | 31 |
Issue number | 3 |
Early online date | 1 Mar 2022 |
DOIs | |
Publication status | Published - Jun 2022 |
Keywords
- Cylindrical tube
- Density sensor
- Nickel electroplated tube
- Mass flow sensor
- 22/1 OA procedure