Frequency dependence of thermal excitation of micromechanical resonators

Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    37 Citations (Scopus)
    114 Downloads (Pure)


    theoretical and experimental study is presented on thermal excitation of micromechanical resonators. It is shown that there is a turnover frequency, ωt, which is related to the square of the ratio of the penetration depth of the thermal wave into the structure and its thickness. For constant power dissipation at the surface of the structure, the bending moment is independent of the frequency ω at ω << ωt, while at ω >> ωt, it is proportional to ω-1. At high frequency we obtain a phase shift of -π/2. Vibration amplitudes and turnover frequencies measured on clamped beam structures agree well with the theory.
    Original languageEnglish
    Pages (from-to)685-689
    Number of pages5
    JournalSensors and actuators. A: Physical
    Issue number1-3
    Publication statusPublished - May 1991


    Dive into the research topics of 'Frequency dependence of thermal excitation of micromechanical resonators'. Together they form a unique fingerprint.

    Cite this