Frequency dependence of thermal excitation of micromechanical resonators

Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. Fluitman

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    Abstract

    theoretical and experimental study is presented on thermal excitation of micromechanical resonators. It is shown that there is a turnover frequency, ωt, which is related to the square of the ratio of the penetration depth of the thermal wave into the structure and its thickness. For constant power dissipation at the surface of the structure, the bending moment is independent of the frequency ω at ω << ωt, while at ω >> ωt, it is proportional to ω-1. At high frequency we obtain a phase shift of -π/2. Vibration amplitudes and turnover frequencies measured on clamped beam structures agree well with the theory.
    Original languageEnglish
    Pages (from-to)685-689
    Number of pages5
    JournalSensors and actuators. A: Physical
    Volume27
    Issue number1-3
    DOIs
    Publication statusPublished - May 1991

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