Frequency dependence of thermal excitation of micromechanical resonators

T.S.J. Lammerink, M. Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors 1990
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

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