From an atomistic to a continuum description of crystal growth

E. van Veenendaal

    Research output: ThesisPhD Thesis - Research UT, graduation external

    Abstract

    Attention is focused to one specific application: wet chemical anisotropic etching of silicon, an important, technologically relevant process used in micro systems technology.
    Original languageUndefined
    Supervisors/Advisors
    • van Enckevort, W.J.P., Advisor, External person
    • Vlieg, Elias, Supervisor, External person
    • Elwenspoek, Michael Curt, Supervisor
    Thesis sponsors
    Award date20 Mar 2001
    Place of PublicationNijmegen, Netherlands
    Publisher
    Print ISBNs90-373-0560-1
    Publication statusPublished - 20 Mar 2001

    Keywords

    • EWI-14540

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