Abstract
Attention is focused to one specific application: wet chemical anisotropic etching of silicon, an important, technologically relevant process used in micro systems technology.
Original language | Undefined |
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Supervisors/Advisors |
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Thesis sponsors | |
Award date | 20 Mar 2001 |
Place of Publication | Nijmegen, Netherlands |
Publisher | |
Print ISBNs | 90-373-0560-1 |
Publication status | Published - 20 Mar 2001 |
Keywords
- EWI-14540