From an atomistic to a continuum description of crystal growth: application to wet chemical etching of silicon

Erik van Veenendaal

Research output: ThesisPhD Thesis - Research external, graduation externalAcademic

Original languageEnglish
Awarding Institution
  • Radboud University Nijmegen
Supervisors/Advisors
  • Vlieg, Elias, Advisor, External person
  • Elwenspoek, Michael Curt, Advisor
Award date20 Mar 2001
Place of PublicationNijmegen
Publisher
Print ISBNs90-3730560-1
Publication statusPublished - 20 Mar 2001
Externally publishedYes

Cite this

van Veenendaal, Erik. / From an atomistic to a continuum description of crystal growth : application to wet chemical etching of silicon. Nijmegen : Katholieke Universiteit Nijmegen, 2001. 306 p.
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From an atomistic to a continuum description of crystal growth : application to wet chemical etching of silicon. / van Veenendaal, Erik.

Nijmegen : Katholieke Universiteit Nijmegen, 2001. 306 p.

Research output: ThesisPhD Thesis - Research external, graduation externalAcademic

TY - THES

T1 - From an atomistic to a continuum description of crystal growth

T2 - application to wet chemical etching of silicon

AU - van Veenendaal, Erik

PY - 2001/3/20

Y1 - 2001/3/20

M3 - PhD Thesis - Research external, graduation external

SN - 90-3730560-1

PB - Katholieke Universiteit Nijmegen

CY - Nijmegen

ER -

van Veenendaal E. From an atomistic to a continuum description of crystal growth: application to wet chemical etching of silicon. Nijmegen: Katholieke Universiteit Nijmegen, 2001. 306 p.