From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides

Sourish Banerjee

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    466 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'From radical-enhanced to pure thermal ALD of gallium and aluminium nitrides'. Together they form a unique fingerprint.

    Physics & Astronomy