Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

R.J. Wiegerink; T.S.J. Lammerink; J. Haneveld; T.A.G. Hageman; J.C. Lötters

doi:10.1109/MEMSYS.2011.5734630

Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

R.J. Wiegerink, T.S.J. Lammerink, J. Haneveld, T.A.G. Hageman, J.C. Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

2 Downloads (Pure)

Abstract

This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped electrode design is used to prevent squeezed film damping so that the sensor can operate at atmospheric pressure, thus eliminating the need for vacuum packaging. The new sensor chip no longer requires large external magnets and the size of the chip itself has been reduced to 7.5x7.5 mm2.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1135-1138
Number of pages	4
ISBN (Print)	978-1-4244-9633-4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734630
Publication status	Published - Jan 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated title	MEMS
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

Keywords

METIS-285062
EWI-21388
IR-79585

Access to Document

10.1109/MEMSYS.2011.5734630

Cite this

@inproceedings{b2e4d62653d04ecca6affc5955d27991,

title = "Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure",

abstract = "This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped electrode design is used to prevent squeezed film damping so that the sensor can operate at atmospheric pressure, thus eliminating the need for vacuum packaging. The new sensor chip no longer requires large external magnets and the size of the chip itself has been reduced to 7.5x7.5 mm2.",

keywords = "METIS-285062, EWI-21388, IR-79585",

author = "R.J. Wiegerink and T.S.J. Lammerink and J. Haneveld and T.A.G. Hageman and J.C. L{\"o}tters",

year = "2011",

month = jan,

doi = "10.1109/MEMSYS.2011.5734630",

language = "English",

isbn = "978-1-4244-9633-4",

pages = "1135--1138",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011)",

publisher = "IEEE",

address = "United States",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, MEMS ; Conference date: 23-01-2011 Through 27-01-2011",

}

Wiegerink, RJ , Lammerink, TSJ, Haneveld, J, Hageman, TAG & Lötters, JC 2011, Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, Piscataway, NJ, pp. 1135-1138, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734630

Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. / Wiegerink, R.J.; Lammerink, T.S.J.; Haneveld, J. et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ: IEEE, 2011. p. 1135-1138.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped electrode design is used to prevent squeezed film damping so that the sensor can operate at atmospheric pressure, thus eliminating the need for vacuum packaging. The new sensor chip no longer requires large external magnets and the size of the chip itself has been reduced to 7.5x7.5 mm2.

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