Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure

R.J. Wiegerink, T.S.J. Lammerink, J. Haneveld, T.A.G. Hageman, J.C. Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)

Abstract

This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped electrode design is used to prevent squeezed film damping so that the sensor can operate at atmospheric pressure, thus eliminating the need for vacuum packaging. The new sensor chip no longer requires large external magnets and the size of the chip itself has been reduced to 7.5x7.5 mm2.
Original languageEnglish
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011)
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1135-1138
Number of pages4
ISBN (Print)978-1-4244-9633-4
DOIs
Publication statusPublished - Jan 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 23 Jan 201127 Jan 2011
Conference number: 24

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated titleMEMS
CountryMexico
CityCancun
Period23/01/1127/01/11

Fingerprint

mass flow
atmospheric pressure
sensors
chips
electrodes
actuation
packaging
silicon nitrides
readout
magnets
damping
wafers
electrostatics
vacuum
fluids
silicon

Keywords

  • METIS-285062
  • EWI-21388
  • IR-79585

Cite this

Wiegerink, R. J., Lammerink, T. S. J., Haneveld, J., Hageman, T. A. G., & Lötters, J. C. (2011). Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011) (pp. 1135-1138). Piscataway, NJ: IEEE. https://doi.org/10.1109/MEMSYS.2011.5734630
Wiegerink, R.J. ; Lammerink, T.S.J. ; Haneveld, J. ; Hageman, T.A.G. ; Lötters, J.C. / Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ : IEEE, 2011. pp. 1135-1138
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abstract = "This paper discusses the design and realization of a micromachined micro Coriolis flow sensor with integrated electrodes for both electrostatic actuation and capacitive readout. The sensor was realized using semicircular channels just beneath the surface of the silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. A comb-shaped electrode design is used to prevent squeezed film damping so that the sensor can operate at atmospheric pressure, thus eliminating the need for vacuum packaging. The new sensor chip no longer requires large external magnets and the size of the chip itself has been reduced to 7.5x7.5 mm2.",
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Wiegerink, RJ, Lammerink, TSJ, Haneveld, J, Hageman, TAG & Lötters, JC 2011, Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, Piscataway, NJ, pp. 1135-1138, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734630

Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. / Wiegerink, R.J.; Lammerink, T.S.J.; Haneveld, J.; Hageman, T.A.G.; Lötters, J.C.

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ : IEEE, 2011. p. 1135-1138.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Wiegerink RJ, Lammerink TSJ, Haneveld J, Hageman TAG, Lötters JC. Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011). Piscataway, NJ: IEEE. 2011. p. 1135-1138 https://doi.org/10.1109/MEMSYS.2011.5734630