Fully integrated three dimensional sound intensity sensor

Doekle Reinder Yntema, Remco J. Wiegerink, J.W. van Honschoten, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    13 Citations (Scopus)
    78 Downloads (Pure)

    Abstract

    For the first time, a complete 3-dimensional sound intensity sensor – consisting of 4 particle velocity sensors and a pressure microphone – has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.
    Original languageEnglish
    Title of host publicationProceedings IEEE The Twentieth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2007)
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society Press
    Pages51-54
    Number of pages4
    ISBN (Print)978-1-4244-0950-1
    DOIs
    Publication statusPublished - 21 Jan 2007
    Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
    Duration: 21 Jan 200725 Jan 2007
    Conference number: 20

    Publication series

    Name
    PublisherIEEE Computer Society Press
    ISSN (Print)0018-9219
    ISSN (Electronic)1558-2256

    Conference

    Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
    Abbreviated titleMEMS
    CountryJapan
    CityKobe
    Period21/01/0725/01/07

    Keywords

    • EWI-8981
    • METIS-245701
    • IR-66845

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  • Cite this

    Yntema, D. R., Wiegerink, R. J., van Honschoten, J. W., & Elwenspoek, M. C. (2007). Fully integrated three dimensional sound intensity sensor. In Proceedings IEEE The Twentieth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2007) (pp. 51-54). Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2007.4433010