Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider

Satomitsu Imai, G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman

    Research output: Contribution to conferencePaperAcademicpeer-review

    3 Citations (Scopus)
    93 Downloads (Pure)

    Abstract

    To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0. 11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured.
    Original languageEnglish
    Pages3675-3677
    Number of pages3
    DOIs
    Publication statusPublished - Sep 1996
    EventIEEE International Magnetics Conference, INTERMAG 1996 - Seattle, United States
    Duration: 9 Apr 199612 Apr 1996

    Conference

    ConferenceIEEE International Magnetics Conference, INTERMAG 1996
    Abbreviated titleINTERMAG
    Country/TerritoryUnited States
    CitySeattle
    Period9/04/9612/04/96

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