Abstract
To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0. 11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured.
Original language | English |
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Pages | 3675-3677 |
Number of pages | 3 |
DOIs | |
Publication status | Published - Sep 1996 |
Event | IEEE International Magnetics Conference, INTERMAG 1996 - Seattle, United States Duration: 9 Apr 1996 → 12 Apr 1996 |
Conference
Conference | IEEE International Magnetics Conference, INTERMAG 1996 |
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Abbreviated title | INTERMAG |
Country/Territory | United States |
City | Seattle |
Period | 9/04/96 → 12/04/96 |