Further outgassing studies on SU-8

J. Melai, V.M. Blanco Carballo, Cora Salm, Robertus A.M. Wolters, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.
Original languageUndefined
Title of host publicationProceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)
Place of PublicationUtrecht, The Netherlands
PublisherSTW
Pages491-494
Number of pages4
ISBN (Print)978-90-73461-56-7
Publication statusPublished - 27 Nov 2008
Event11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands
Duration: 27 Nov 200828 Nov 2008
Conference number: 11

Publication series

Name
PublisherTechnology Foundation STW
NumberWoTUG-31

Workshop

Workshop11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008
Abbreviated titleSAFE
CountryNetherlands
CityVeldhoven
Period27/11/0828/11/08

Keywords

  • SC-RID: Radiation Imaging detectors
  • METIS-255000
  • IR-62609
  • EWI-14609

Cite this

Melai, J., Blanco Carballo, V. M., Salm, C., Wolters, R. A. M., & Schmitz, J. (2008). Further outgassing studies on SU-8. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008) (pp. 491-494). Utrecht, The Netherlands: STW.
Melai, J. ; Blanco Carballo, V.M. ; Salm, Cora ; Wolters, Robertus A.M. ; Schmitz, Jurriaan. / Further outgassing studies on SU-8. Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands : STW, 2008. pp. 491-494
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title = "Further outgassing studies on SU-8",
abstract = "SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.",
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author = "J. Melai and {Blanco Carballo}, V.M. and Cora Salm and Wolters, {Robertus A.M.} and Jurriaan Schmitz",
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Melai, J, Blanco Carballo, VM, Salm, C, Wolters, RAM & Schmitz, J 2008, Further outgassing studies on SU-8. in Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). STW, Utrecht, The Netherlands, pp. 491-494, 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, Veldhoven, Netherlands, 27/11/08.

Further outgassing studies on SU-8. / Melai, J.; Blanco Carballo, V.M.; Salm, Cora; Wolters, Robertus A.M.; Schmitz, Jurriaan.

Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands : STW, 2008. p. 491-494.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Further outgassing studies on SU-8

AU - Melai, J.

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N2 - SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.

AB - SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.

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KW - EWI-14609

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BT - Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)

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Melai J, Blanco Carballo VM, Salm C, Wolters RAM, Schmitz J. Further outgassing studies on SU-8. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW. 2008. p. 491-494