Further outgassing studies on SU-8

J. Melai, V.M. Blanco Carballo, Cora Salm, Robertus A.M. Wolters, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.
    Original languageUndefined
    Title of host publicationProceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages491-494
    Number of pages4
    ISBN (Print)978-90-73461-56-7
    Publication statusPublished - 27 Nov 2008
    Event11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands
    Duration: 27 Nov 200828 Nov 2008
    Conference number: 11

    Publication series

    Name
    PublisherTechnology Foundation STW
    NumberWoTUG-31

    Workshop

    Workshop11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period27/11/0828/11/08

    Keywords

    • SC-RID: Radiation Imaging detectors
    • METIS-255000
    • IR-62609
    • EWI-14609

    Cite this

    Melai, J., Blanco Carballo, V. M., Salm, C., Wolters, R. A. M., & Schmitz, J. (2008). Further outgassing studies on SU-8. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008) (pp. 491-494). Utrecht, The Netherlands: STW.