Further outgassing studies on SU-8

J. Melai; V.M. Blanco Carballo; Cora Salm; Robertus A.M. Wolters; Jurriaan Schmitz

Further outgassing studies on SU-8

J. Melai, V.M. Blanco Carballo, Cora Salm, Robertus A.M. Wolters, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.

Original language	Undefined
Title of host publication	Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	491-494
Number of pages	4
ISBN (Print)	978-90-73461-56-7
Publication status	Published - 27 Nov 2008
Event	11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands Duration: 27 Nov 2008 → 28 Nov 2008 Conference number: 11

Publication series

Name
Publisher	Technology Foundation STW
Number	WoTUG-31

Workshop

Workshop	11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	27/11/08 → 28/11/08

Keywords

SC-RID: Radiation Imaging detectors
METIS-255000
IR-62609
EWI-14609

Access to Document

http://eprints.eemcs.utwente.nl/secure2/14609/01/melai.pdf

Cite this

@inproceedings{f2fb3c71f20d4d7f9f689fdbb7fa2a0c,

title = "Further outgassing studies on SU-8",

abstract = "SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.",

keywords = "SC-RID: Radiation Imaging detectors, METIS-255000, IR-62609, EWI-14609",

author = "J. Melai and {Blanco Carballo}, V.M. and Cora Salm and Wolters, {Robertus A.M.} and Jurriaan Schmitz",

year = "2008",

month = nov,

day = "27",

language = "Undefined",

isbn = "978-90-73461-56-7",

publisher = "STW",

number = "WoTUG-31",

pages = "491--494",

booktitle = "Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)",

note = "11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 ; Conference date: 27-11-2008 Through 28-11-2008",

}

Melai, J, Blanco Carballo, VM, Salm, C, Wolters, RAM & Schmitz, J 2008, Further outgassing studies on SU-8. in Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). STW, Utrecht, The Netherlands, pp. 491-494, 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, Veldhoven, Netherlands, 27/11/08. <http://eprints.eemcs.utwente.nl/secure2/14609/01/melai.pdf>

Further outgassing studies on SU-8. / Melai, J.; Blanco Carballo, V.M.; Salm, Cora et al.
Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW, 2008. p. 491-494.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Further outgassing studies on SU-8

AU - Melai, J.

AU - Blanco Carballo, V.M.

AU - Salm, Cora

AU - Wolters, Robertus A.M.

AU - Schmitz, Jurriaan

N1 - Conference code: 11

PY - 2008/11/27

Y1 - 2008/11/27

N2 - SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.

AB - SU-8 is often used as a structural material in microsystems. In this work the outgassing characteristics from such cross-linked SU-8 layers are studied using Mass Spectrometry and Gas Chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of Hard-Bakes is studied in situ by measuring at typical Hard-Bake temperatures. These tests indicate that a Hard-Bake is needed to provide good performance in UHV environments. Using Gas-Chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step.

KW - SC-RID: Radiation Imaging detectors

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KW - IR-62609

KW - EWI-14609

M3 - Conference contribution

SN - 978-90-73461-56-7

SP - 491

EP - 494

BT - Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)

PB - STW

CY - Utrecht, The Netherlands

T2 - 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008

Y2 - 27 November 2008 through 28 November 2008

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