Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement

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Abstract

A thermal flow sensor for gases is presented that measures the flow rate independent of the type of the gas by simultaneously measuring and compensating for the thermal conductivity (k) and volumetric heat capacity (ρc p ) of the gas. A suspended wire on a V-groove cavity is used to measure both fluid parameters independent of the flow rate. The output of the thermal flow sensor is automatically corrected for the medium using these measured parameters.
Original languageEnglish
Title of host publication2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages801-804
Number of pages4
ISBN (Electronic)979-8-3503-5792-9
DOIs
Publication statusPublished - 22 Feb 2024
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: 21 Jan 202425 Jan 2024
Conference number: 37

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Abbreviated titleMEMS 2024
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Keywords

  • 2024 OA procedure

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