Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement

Shirin Azadi Kenari; Remco J. Wiegerink; Remco G.P. Sanders; Joost C. Lötters

doi:10.1109/mems58180.2024.10439397

Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A thermal flow sensor for gases is presented that measures the flow rate independent of the type of the gas by simultaneously measuring and compensating for the thermal conductivity (k) and volumetric heat capacity (ρc p ) of the gas. A suspended wire on a V-groove cavity is used to measure both fluid parameters independent of the flow rate. The output of the thermal flow sensor is automatically corrected for the medium using these measured parameters.

Original language	English
Title of host publication	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	801-804
Number of pages	4
ISBN (Electronic)	979-8-3503-5792-9
DOIs	https://doi.org/10.1109/mems58180.2024.10439397
Publication status	Published - 22 Feb 2024
Event	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024 Conference number: 37

Conference

Conference	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Abbreviated title	MEMS 2024
Country/Territory	United States
City	Austin
Period	21/01/24 → 25/01/24

Keywords

2024 OA procedure

Access to Document

10.1109/mems58180.2024.10439397

Gas_Independent_Thermal_Flow_Meter_Based_on_Real-Time_Velocity-Independent_k_and_cp_MeasurementFinal published version, 2.67 MBLicence: Taverne

Cite this

@inproceedings{af53b47b93554d348200d2fb240f1f5b,

title = "Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement",

abstract = "A thermal flow sensor for gases is presented that measures the flow rate independent of the type of the gas by simultaneously measuring and compensating for the thermal conductivity (k) and volumetric heat capacity (ρc p ) of the gas. A suspended wire on a V-groove cavity is used to measure both fluid parameters independent of the flow rate. The output of the thermal flow sensor is automatically corrected for the medium using these measured parameters.",

keywords = "2024 OA procedure",

author = "Kenari, \{Shirin Azadi\} and Wiegerink, \{Remco J.\} and Sanders, \{Remco G.P.\} and L{\"o}tters, \{Joost C.\}",

year = "2024",

month = feb,

day = "22",

doi = "10.1109/mems58180.2024.10439397",

language = "English",

pages = "801--804",

booktitle = "2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",

}

Kenari, SA, Wiegerink, RJ , Sanders, RGP & Lötters, JC 2024, Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement. in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). pp. 801-804, 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, Austin, Texas, United States, 21/01/24. https://doi.org/10.1109/mems58180.2024.10439397

Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement. / Kenari, Shirin Azadi; Wiegerink, Remco J.; Sanders, Remco G.P. et al.
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). 2024. p. 801-804.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement

AU - Kenari, Shirin Azadi

AU - Wiegerink, Remco J.

AU - Sanders, Remco G.P.

AU - Lötters, Joost C.

N1 - Conference code: 37

PY - 2024/2/22

Y1 - 2024/2/22

N2 - A thermal flow sensor for gases is presented that measures the flow rate independent of the type of the gas by simultaneously measuring and compensating for the thermal conductivity (k) and volumetric heat capacity (ρc p ) of the gas. A suspended wire on a V-groove cavity is used to measure both fluid parameters independent of the flow rate. The output of the thermal flow sensor is automatically corrected for the medium using these measured parameters.

AB - A thermal flow sensor for gases is presented that measures the flow rate independent of the type of the gas by simultaneously measuring and compensating for the thermal conductivity (k) and volumetric heat capacity (ρc p ) of the gas. A suspended wire on a V-groove cavity is used to measure both fluid parameters independent of the flow rate. The output of the thermal flow sensor is automatically corrected for the medium using these measured parameters.

KW - 2024 OA procedure

U2 - 10.1109/mems58180.2024.10439397

DO - 10.1109/mems58180.2024.10439397

M3 - Conference contribution

SP - 801

EP - 804

BT - 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024

Y2 - 21 January 2024 through 25 January 2024

ER -

Gas Independent Thermal Flow Meter Based on Real-Time Velocity-Independent k and ρcp Measurement

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