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Gate polysilicon optimization for deep-submicron MOSFETs
J. Schmitz*, H.P. Tuinhout, A.H. Montree, Y.V. Ponomarev, P.A. Stolk, P.H. Woerlee
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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