Abstract
This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid.The device consists of a GEM-like structure fabricated with SU-8 photo resist directly on top of a Timepix chip with zero gap distance.
The detector characteristics have been studied in several gas mixtures. The device is capable of tracking minimum ionizing particles and exhibits good energy resolution on 55Fe decays.
We further show a strongly improved mechanical robustness of these GEM-like structures as compared to a pillar-supported integrated Micromegas.
Original language | Undefined |
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Article number | 10.1016/j.nima.2009.06.023 |
Pages (from-to) | 86-91 |
Number of pages | 6 |
Journal | Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment |
Volume | 608 |
Issue number | 1 |
DOIs | |
Publication status | Published - 18 Jun 2009 |
Keywords
- SC-RID: Radiation Imaging detectors
- GEM Micromegas
- SU-8
- Proportional chambers
- Radiation detectors
- EWI-15814
- METIS-266515
- IR-67835
- CMOS post-processing
- Above IC
- Microsystems