GEMGrid: a wafer post-processed GEM-like radiation detector

V.M. Blanco Carballo, Y. Bilevych, Y. Bilevych, M.A. Chefdeville, M. Fransen, H. van der Graaf, Cora Salm, Jurriaan Schmitz, J. Timmermans, J. Timmermans

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    6 Citations (Scopus)


    This paper presents a new wafer post-processed micropatterned gaseous radiation detector called GEMGrid.The device consists of a GEM-like structure fabricated with SU-8 photo resist directly on top of a Timepix chip with zero gap distance. The detector characteristics have been studied in several gas mixtures. The device is capable of tracking minimum ionizing particles and exhibits good energy resolution on 55Fe decays. We further show a strongly improved mechanical robustness of these GEM-like structures as compared to a pillar-supported integrated Micromegas.
    Original languageUndefined
    Article number10.1016/j.nima.2009.06.023
    Pages (from-to)86-91
    Number of pages6
    JournalNuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
    Issue number1
    Publication statusPublished - 18 Jun 2009


    • SC-RID: Radiation Imaging detectors
    • GEM Micromegas
    • SU-8
    • Proportional chambers
    • Radiation detectors
    • EWI-15814
    • METIS-266515
    • IR-67835
    • CMOS post-processing
    • Above IC
    • Microsystems

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