Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas

Lars Behnke; Yahia Y. Mostafa; Ruben Schupp; Zoi Bouza; Adam Lassise; Muharrem Bayraktar; John Sheil; Ronnie Hoekstra; Wim Ubachs; Oscar O. Versolato

Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas

Lars Behnke^*, Yahia Y. Mostafa, Ruben Schupp, Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, Wim Ubachs, Oscar O. Versolato

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A laser system based on three-wave mixing is used to generate laser-light at 2-micometer wavelength. This system is used for in-depth studies of the utility of 2-micrometer-driven sources of extreme ultraviolet (EUV) light in Nanolithography.

Original language	English
Title of host publication	Mid-Infrared Coherent Sources, MICS 2022
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9781557528209
Publication status	Published - 2022
Event	Mid-Infrared Coherent Sources, MICS 2022 - Budapest, Hungary Duration: 21 Mar 2022 → 25 Mar 2022

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Mid-Infrared Coherent Sources, MICS 2022
Country/Territory	Hungary
City	Budapest
Period	21/03/22 → 25/03/22

Keywords

NLA

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

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title = "Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas",

abstract = "A laser system based on three-wave mixing is used to generate laser-light at 2-micometer wavelength. This system is used for in-depth studies of the utility of 2-micrometer-driven sources of extreme ultraviolet (EUV) light in Nanolithography.",

keywords = "NLA",

author = "Lars Behnke and Mostafa, {Yahia Y.} and Ruben Schupp and Zoi Bouza and Adam Lassise and Muharrem Bayraktar and John Sheil and Ronnie Hoekstra and Wim Ubachs and Versolato, {Oscar O.}",

note = "Publisher Copyright: {\textcopyright} 2022 The Auther(s).; Mid-Infrared Coherent Sources, MICS 2022 ; Conference date: 21-03-2022 Through 25-03-2022",

year = "2022",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Mid-Infrared Coherent Sources, MICS 2022",

address = "United States",

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Behnke, L, Mostafa, YY, Schupp, R, Bouza, Z, Lassise, A, Bayraktar, M, Sheil, J, Hoekstra, R, Ubachs, W & Versolato, OO 2022, Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas. in Mid-Infrared Coherent Sources, MICS 2022., JW5A.8, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Mid-Infrared Coherent Sources, MICS 2022, Budapest, Hungary, 21/03/22.

Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas. / Behnke, Lars; Mostafa, Yahia Y.; Schupp, Ruben et al.
Mid-Infrared Coherent Sources, MICS 2022. Optica Publishing Group (formerly OSA), 2022. JW5A.8 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas

AU - Behnke, Lars

AU - Mostafa, Yahia Y.

AU - Schupp, Ruben

AU - Bouza, Zoi

AU - Lassise, Adam

AU - Bayraktar, Muharrem

AU - Sheil, John

AU - Hoekstra, Ronnie

AU - Ubachs, Wim

AU - Versolato, Oscar O.

PY - 2022

Y1 - 2022

N2 - A laser system based on three-wave mixing is used to generate laser-light at 2-micometer wavelength. This system is used for in-depth studies of the utility of 2-micrometer-driven sources of extreme ultraviolet (EUV) light in Nanolithography.

AB - A laser system based on three-wave mixing is used to generate laser-light at 2-micometer wavelength. This system is used for in-depth studies of the utility of 2-micrometer-driven sources of extreme ultraviolet (EUV) light in Nanolithography.

KW - NLA

UR - http://www.scopus.com/inward/record.url?scp=85136371891&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85136371891

T3 - Optics InfoBase Conference Papers

BT - Mid-Infrared Coherent Sources, MICS 2022

PB - Optica Publishing Group (formerly OSA)

T2 - Mid-Infrared Coherent Sources, MICS 2022

Y2 - 21 March 2022 through 25 March 2022

ER -

Generation of 2-micrometer wavelength laser-light to drive euv-emitting plasmas

Abstract

Publication series

Conference

Keywords

UN SDGs

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