Generation of VUV radiation with ionic and F2 excimer lasers

P.J.M. Peters, Hubertus M.J. Bastiaens

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Original languageUndefined
Title of host publicationGas Lasers - Recent Developments and Future Prospects
Place of PublicationDordrecht, Boston, London
PublisherKluwer Academic Publishers
Pages23-36
Number of pages13
ISBN (Print)0-7923-3988-6
Publication statusPublished - 1996

Keywords

  • METIS-129947

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