Geometrical optimization of an acoustic thermal flow sensor

J.W. van Honschoten, P. Ekkels, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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    Abstract

    In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.
    Original languageEnglish
    Title of host publicationEurosensors XVII
    Subtitle of host publicationThe 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts
    Place of PublicationGuimaraes, Portugal
    Pages302-303
    Number of pages2
    Publication statusPublished - 1 Sep 2003
    EventEurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal
    Duration: 21 Sep 200324 Sep 2003

    Conference

    ConferenceEurosensors XVII, European Conference on Solid-State Transducers
    CountryPortugal
    CityGuimaraes
    Period21/09/0324/09/03

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  • Cite this

    van Honschoten, J. W., Ekkels, P., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). Geometrical optimization of an acoustic thermal flow sensor. In Eurosensors XVII: The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts (pp. 302-303). Guimaraes, Portugal.