In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.
|Title of host publication||Eurosensors XVII|
|Subtitle of host publication||The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts|
|Place of Publication||Guimaraes, Portugal|
|Number of pages||2|
|Publication status||Published - 1 Sep 2003|
|Event||Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal|
Duration: 21 Sep 2003 → 24 Sep 2003
|Conference||Eurosensors XVII, European Conference on Solid-State Transducers|
|Period||21/09/03 → 24/09/03|
van Honschoten, J. W., Ekkels, P., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). Geometrical optimization of an acoustic thermal flow sensor. In Eurosensors XVII: The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts (pp. 302-303). Guimaraes, Portugal.