Geometrical optimization of an acoustic thermal flow sensor

J.W. van Honschoten; P. Ekkels; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

Geometrical optimization of an acoustic thermal flow sensor

J.W. van Honschoten, P. Ekkels, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.

Original language	English
Title of host publication	Eurosensors XVII
Subtitle of host publication	The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts
Place of Publication	Guimaraes, Portugal
Pages	302-303
Number of pages	2
Publication status	Published - 1 Sept 2003
Event	Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal Duration: 21 Sept 2003 → 24 Sept 2003

Conference

Conference	Eurosensors XVII, European Conference on Solid-State Transducers
Country/Territory	Portugal
City	Guimaraes
Period	21/09/03 → 24/09/03

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@inproceedings{c99fd4662cdc48b5823e3597745596e3,

title = "Geometrical optimization of an acoustic thermal flow sensor",

abstract = "In this paper a thermal acoustic flow sensor that measures particle velocity (the {\textquoteleft}Microflown{\textquoteright}) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.",

author = "{van Honschoten}, J.W. and P. Ekkels and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2003",

month = sep,

day = "1",

language = "English",

isbn = "972-98603-1-9",

pages = "302--303",

booktitle = "Eurosensors XVII",

note = "Eurosensors XVII, European Conference on Solid-State Transducers ; Conference date: 21-09-2003 Through 24-09-2003",

}

van Honschoten, JW, Ekkels, P, Krijnen, GJM & Elwenspoek, MC 2003, Geometrical optimization of an acoustic thermal flow sensor. in Eurosensors XVII: The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts. Guimaraes, Portugal, pp. 302-303, Eurosensors XVII, European Conference on Solid-State Transducers, Guimaraes, Portugal, 21/09/03.

Geometrical optimization of an acoustic thermal flow sensor. / van Honschoten, J.W.; Ekkels, P.; Krijnen, Gijsbertus J.M. et al.
Eurosensors XVII: The 17th European Conference on Solid-State Transducers September 21-24, 2003 Guimarães, Portugal: Book of Abstracts. Guimaraes, Portugal, 2003. p. 302-303.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Geometrical optimization of an acoustic thermal flow sensor

AU - van Honschoten, J.W.

AU - Ekkels, P.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2003/9/1

Y1 - 2003/9/1

N2 - In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.

AB - In this paper a thermal acoustic flow sensor that measures particle velocity (the ‘Microflown’) is analyzed. A model is developed that calculates the sensor sensitivity and its frequency dependent behavior, as a function of material parameters and device geometry. Consequently, improved devices could be fabricated, with a new geometry consisting of three wires of which the central wire is relatively most heated. These are the best performing sensors up to date with a frequency range attending over 5 kHz and signal-to-noise ratios improved by 10 dB to more than 20 dB over previous designs.

M3 - Conference contribution

SN - 972-98603-1-9

SP - 302

EP - 303

BT - Eurosensors XVII

CY - Guimaraes, Portugal

T2 - Eurosensors XVII, European Conference on Solid-State Transducers

Y2 - 21 September 2003 through 24 September 2003

ER -

Geometrical optimization of an acoustic thermal flow sensor

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