Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio’s similar to those possible in silicon. Main applications are chemical separation methods such as High Performance Liquid Chromatography (HPLC) or Capillary Zone Electrophoresis (CZE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in correlation CZE, and demonstrated by determining the precision of consecutive single injections.
|Conference||Dutch Sensor Conference 1998|
|Period||2/03/98 → 3/03/98|
- Capillary Zone Electrophoresis (CZE)
- High Performance Liquid Chromatography (HPLC)