Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

L.J. Kauppinen, Hugo Hoekstra, Mindert Dijkstra, R.M. de Ridder, Gijsbertus J.M. Krijnen

  • 6 Citations

Abstract

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.
Original languageUndefined
Title of host publicationProceedings of the 14th European Conference on Integrated Optics (ECIO)
EditorsX.J.M. Leijtens
Place of PublicationEindhoven, The Netherlands
PublisherEindhoven University of Technology
Pages111-114
Number of pages4
ISBN (Print)978-90-386-1317-8
StatePublished - Jun 2008
Event14th European Conference on Integrated Optics, ECIO 2008 - Eindhoven, Netherlands

Publication series

Name
PublisherEindhoven University of Technology
Number302

Conference

Conference14th European Conference on Integrated Optics, ECIO 2008
Abbreviated titleECIO
CountryNetherlands
CityEindhoven
Period11/06/0813/06/08

Fingerprint

waveguides
proximity
deflection
cavities

Keywords

  • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
  • IOMS-SNS: SENSORS
  • IR-64858
  • METIS-251059
  • EWI-13028

Cite this

Kauppinen, L. J., Hoekstra, H., Dijkstra, M., de Ridder, R. M., & Krijnen, G. J. M. (2008). Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In X. J. M. Leijtens (Ed.), Proceedings of the 14th European Conference on Integrated Optics (ECIO) (pp. 111-114). Eindhoven, The Netherlands: Eindhoven University of Technology.

Kauppinen, L.J.; Hoekstra, Hugo; Dijkstra, Mindert; de Ridder, R.M.; Krijnen, Gijsbertus J.M. / Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections.

Proceedings of the 14th European Conference on Integrated Optics (ECIO). ed. / X.J.M. Leijtens. Eindhoven, The Netherlands : Eindhoven University of Technology, 2008. p. 111-114.

Research output: Scientific - peer-reviewConference contribution

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Kauppinen, LJ, Hoekstra, H, Dijkstra, M, de Ridder, RM & Krijnen, GJM 2008, Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. in XJM Leijtens (ed.), Proceedings of the 14th European Conference on Integrated Optics (ECIO). Eindhoven University of Technology, Eindhoven, The Netherlands, pp. 111-114, 14th European Conference on Integrated Optics, ECIO 2008, Eindhoven, Netherlands, 11-13 June.

Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. / Kauppinen, L.J.; Hoekstra, Hugo; Dijkstra, Mindert; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

Proceedings of the 14th European Conference on Integrated Optics (ECIO). ed. / X.J.M. Leijtens. Eindhoven, The Netherlands : Eindhoven University of Technology, 2008. p. 111-114.

Research output: Scientific - peer-reviewConference contribution

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T1 - Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

AU - Kauppinen,L.J.

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AU - Dijkstra,Mindert

AU - de Ridder,R.M.

AU - Krijnen,Gijsbertus J.M.

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AB - We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

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BT - Proceedings of the 14th European Conference on Integrated Optics (ECIO)

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Kauppinen LJ, Hoekstra H, Dijkstra M, de Ridder RM, Krijnen GJM. Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In Leijtens XJM, editor, Proceedings of the 14th European Conference on Integrated Optics (ECIO). Eindhoven, The Netherlands: Eindhoven University of Technology. 2008. p. 111-114.