Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

L.J. Kauppinen; Hugo Hoekstra; Mindert Dijkstra; R.M. de Ridder; Gijsbertus J.M. Krijnen

Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

L.J. Kauppinen, Hugo Hoekstra, Mindert Dijkstra, R.M. de Ridder, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

7 Citations (Scopus)

53 Downloads (Pure)

Abstract

We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.

Original language	Undefined
Title of host publication	Proceedings of the 14th European Conference on Integrated Optics (ECIO)
Editors	X.J.M. Leijtens
Place of Publication	Eindhoven, The Netherlands
Publisher	Eindhoven University of Technology
Pages	111-114
Number of pages	4
ISBN (Print)	978-90-386-1317-8
Publication status	Published - Jun 2008
Event	14th European Conference on Integrated Optics, ECIO 2008 - Eindhoven University of Technology, Eindhoven, Netherlands Duration: 11 Jun 2008 → 13 Jun 2008 Conference number: 14

Publication series

Name
Publisher	Eindhoven University of Technology
Number	302

Conference

Conference	14th European Conference on Integrated Optics, ECIO 2008
Abbreviated title	ECIO
Country/Territory	Netherlands
City	Eindhoven
Period	11/06/08 → 13/06/08

Keywords

IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
IOMS-SNS: SENSORS
IR-64858
METIS-251059
EWI-13028

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Cite this

@inproceedings{3e6133f978df457caa296ac8de70fe99,

title = "Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections",

abstract = "We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.",

keywords = "IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES, IOMS-SNS: SENSORS, IR-64858, METIS-251059, EWI-13028",

author = "L.J. Kauppinen and Hugo Hoekstra and Mindert Dijkstra and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",

year = "2008",

month = jun,

language = "Undefined",

isbn = "978-90-386-1317-8",

publisher = "Eindhoven University of Technology",

number = "302",

pages = "111--114",

editor = "X.J.M. Leijtens",

booktitle = "Proceedings of the 14th European Conference on Integrated Optics (ECIO)",

note = "null ; Conference date: 11-06-2008 Through 13-06-2008",

}

Kauppinen, LJ, Hoekstra, H, Dijkstra, M, de Ridder, RM & Krijnen, GJM 2008, Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. in XJM Leijtens (ed.), Proceedings of the 14th European Conference on Integrated Optics (ECIO). Eindhoven University of Technology, Eindhoven, The Netherlands, pp. 111-114, 14th European Conference on Integrated Optics, ECIO 2008, Eindhoven, Netherlands, 11/06/08.

Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. / Kauppinen, L.J.; Hoekstra, Hugo; Dijkstra, Mindert et al.

Proceedings of the 14th European Conference on Integrated Optics (ECIO). ed. / X.J.M. Leijtens. Eindhoven, The Netherlands : Eindhoven University of Technology, 2008. p. 111-114.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

AU - Kauppinen, L.J.

AU - Hoekstra, Hugo

AU - Dijkstra, Mindert

AU - de Ridder, R.M.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 14

PY - 2008/6

Y1 - 2008/6

N2 - We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.

AB - We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.

KW - IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES

KW - IOMS-SNS: SENSORS

KW - IR-64858

KW - METIS-251059

KW - EWI-13028

M3 - Conference contribution

SN - 978-90-386-1317-8

SP - 111

EP - 114

BT - Proceedings of the 14th European Conference on Integrated Optics (ECIO)

A2 - Leijtens, X.J.M.

PB - Eindhoven University of Technology

CY - Eindhoven, The Netherlands

Y2 - 11 June 2008 through 13 June 2008

ER -