Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections

L.J. Kauppinen, Hugo Hoekstra, Mindert Dijkstra, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    34 Downloads (Pure)

    Abstract

    We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.
    Original languageUndefined
    Title of host publicationProceedings of the 14th European Conference on Integrated Optics (ECIO)
    EditorsX.J.M. Leijtens
    Place of PublicationEindhoven, The Netherlands
    PublisherEindhoven University of Technology
    Pages111-114
    Number of pages4
    ISBN (Print)978-90-386-1317-8
    Publication statusPublished - Jun 2008
    Event14th European Conference on Integrated Optics, ECIO 2008 - Eindhoven University of Technology, Eindhoven, Netherlands
    Duration: 11 Jun 200813 Jun 2008
    Conference number: 14

    Publication series

    Name
    PublisherEindhoven University of Technology
    Number302

    Conference

    Conference14th European Conference on Integrated Optics, ECIO 2008
    Abbreviated titleECIO
    CountryNetherlands
    CityEindhoven
    Period11/06/0813/06/08

    Keywords

    • IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
    • IOMS-SNS: SENSORS
    • IR-64858
    • METIS-251059
    • EWI-13028

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