Abstract
We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. We discuss modelling results for an $SiO_2$ cantilever to be integrated with an optical cavity defined by a grated $Si_3N_4$ waveguide.
Original language | Undefined |
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Title of host publication | Proceedings of the 14th European Conference on Integrated Optics (ECIO) |
Editors | X.J.M. Leijtens |
Place of Publication | Eindhoven, The Netherlands |
Publisher | Eindhoven University of Technology |
Pages | 111-114 |
Number of pages | 4 |
ISBN (Print) | 978-90-386-1317-8 |
Publication status | Published - Jun 2008 |
Event | 14th European Conference on Integrated Optics, ECIO 2008 - Eindhoven University of Technology, Eindhoven, Netherlands Duration: 11 Jun 2008 → 13 Jun 2008 Conference number: 14 |
Publication series
Name | |
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Publisher | Eindhoven University of Technology |
Number | 302 |
Conference
Conference | 14th European Conference on Integrated Optics, ECIO 2008 |
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Abbreviated title | ECIO |
Country/Territory | Netherlands |
City | Eindhoven |
Period | 11/06/08 → 13/06/08 |
Keywords
- IOMS-PCS: PHOTONIC CRYSTAL STRUCTURES
- IOMS-SNS: SENSORS
- IR-64858
- METIS-251059
- EWI-13028