Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

T. N. Terentev*, M. Gateshki, A. Tiwari, R. de Vries, V. Jovanovic, M. D. Ackermann, I. A. Makhotkin

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.

Original languageEnglish
Article number140588
JournalThin solid films
Volume809
Early online date18 Dec 2024
DOIs
Publication statusPublished - 1 Jan 2025

Keywords

  • UT-Hybrid-D
  • Depth profile
  • Elemental distribution
  • Grazing emission X-ray fluorescence
  • X-ray standing waves
  • Chemical composition measurement

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