Abstract
Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.
Original language | English |
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Article number | 140588 |
Journal | Thin solid films |
Volume | 809 |
Early online date | 18 Dec 2024 |
DOIs | |
Publication status | Published - 1 Jan 2025 |
Keywords
- UT-Hybrid-D
- Depth profile
- Elemental distribution
- Grazing emission X-ray fluorescence
- X-ray standing waves
- Chemical composition measurement