Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

T. N. Terentev; M. Gateshki; A. Tiwari; R. de Vries; V. Jovanovic; M. D. Ackermann; I. A. Makhotkin

doi:10.1016/j.tsf.2024.140588

Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

T. N. Terentev^*, M. Gateshki, A. Tiwari, R. de Vries, V. Jovanovic, M. D. Ackermann, I. A. Makhotkin

^*Corresponding author for this work

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Abstract

Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.

Original language	English
Article number	140588
Journal	Thin solid films
Volume	809
Early online date	18 Dec 2024
DOIs	https://doi.org/10.1016/j.tsf.2024.140588
Publication status	Published - 1 Jan 2025

Keywords

UT-Hybrid-D
Depth profile
Elemental distribution
Grazing emission X-ray fluorescence
X-ray standing waves
Chemical composition measurement

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10.1016/j.tsf.2024.140588Licence: CC BY

ArticleFinal published version, 1.22 MBLicence: CC BY

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title = "Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment",

abstract = "Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.",

keywords = "UT-Hybrid-D, Depth profile, Elemental distribution, Grazing emission X-ray fluorescence, X-ray standing waves, Chemical composition measurement",

author = "Terentev, {T. N.} and M. Gateshki and A. Tiwari and {de Vries}, R. and V. Jovanovic and Ackermann, {M. D.} and Makhotkin, {I. A.}",

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doi = "10.1016/j.tsf.2024.140588",

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T1 - Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

AU - Terentev, T. N.

AU - Gateshki, M.

AU - Tiwari, A.

AU - de Vries, R.

AU - Jovanovic, V.

AU - Ackermann, M. D.

AU - Makhotkin, I. A.

PY - 2025/1/1

Y1 - 2025/1/1

N2 - Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.

AB - Grazing emission X-ray fluorescence (GEXRF) is a unique technique with μm spatial resolution that allows elemental characterization with nm depth resolution. Insufficient development of X-ray equipment complicates routine GEXRF measurements in a laboratory environment. We present possibilities of combined X-ray reflectivity and GEXRF measurements using a linear detector and a conventional Cu anode X-ray tube for depth- and elemental-profiles reconstruction of an X-ray waveguide using free form approach. The reconstructed depth profile is verified with the well-established combined X-ray reflectivity and grazing incidence XRF experiment.

KW - UT-Hybrid-D

KW - Depth profile

KW - Elemental distribution

KW - Grazing emission X-ray fluorescence

KW - X-ray standing waves

KW - Chemical composition measurement

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U2 - 10.1016/j.tsf.2024.140588

DO - 10.1016/j.tsf.2024.140588

M3 - Article

SN - 0040-6090

VL - 809

JO - Thin solid films

JF - Thin solid films

M1 - 140588

ER -

Grazing emission X-ray fluorescence characterization of a thin-film waveguide with laboratory equipment

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