Grazing incidence ion etching for versatile design of linear self-affine nanostructures

S. van Dijken, D. de Bruin, Herbert Wormeester, Bene Poelsema

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationVeldhoven
Publication statusPublished - 19 Dec 2000

Keywords

  • METIS-130811

Cite this