Grazing incidence ion etching for versatile design of linear self-affine nanostructures

S. van Dijken, D. de Bruin, Herbert Wormeester, Bene Poelsema

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationVeldhoven
Publication statusPublished - 19 Dec 2000

Keywords

  • METIS-130811

Cite this

@misc{63e5591f2ecd438580c07490e32922ec,
title = "Grazing incidence ion etching for versatile design of linear self-affine nanostructures",
keywords = "METIS-130811",
author = "{van Dijken}, S. and {de Bruin}, D. and Herbert Wormeester and Bene Poelsema",
year = "2000",
month = "12",
day = "19",
language = "Undefined",
type = "Other",

}

Grazing incidence ion etching for versatile design of linear self-affine nanostructures. / van Dijken, S.; de Bruin, D.; Wormeester, Herbert; Poelsema, Bene.

Veldhoven. 2000, .

Research output: Other contributionOther research output

TY - GEN

T1 - Grazing incidence ion etching for versatile design of linear self-affine nanostructures

AU - van Dijken, S.

AU - de Bruin, D.

AU - Wormeester, Herbert

AU - Poelsema, Bene

PY - 2000/12/19

Y1 - 2000/12/19

KW - METIS-130811

M3 - Other contribution

CY - Veldhoven

ER -