Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

Dmitry Kuznetsov*, Andrey Yakshin, J.M. Sturm, F. Bijkerk

*Corresponding author for this work

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We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5% at ≈6.66 nm, AOI = 77° off-normal was achieved, which was reduced by 0.5% absolute in half a year, due to contamination of the top B layer.
Original languageEnglish
Pages (from-to)585-592
Number of pages8
JournalJournal of nanoscience and nanotechnology
Issue number1
Publication statusPublished - 1 Jan 2019


  • 6.x Multilayer
  • EUV Optics
  • Grazing-Incidence
  • La Surface Nitridation
  • LaN/B
  • LaN/La/B
  • XUV Optics
  • 22/2 OA procedure

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