Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

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Abstract

We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5% at ≈6.66 nm, AOI = 77° off-normal was achieved, which was reduced by 0.5% absolute in half a year, due to contamination of the top B layer.
Original languageEnglish
Pages (from-to)585-592
Number of pages8
JournalJournal of nanoscience and nanotechnology
Volume19
Issue number1
DOIs
Publication statusPublished - 1 Jan 2019

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grazing incidence
Multilayers
Mirrors
mirrors
Wavelength
deterioration
wavelengths
Deterioration
Passivation
passivity
periodic variations
contamination
Contamination
incidence
Experiments
reflectance
Radiation
Oxidation
oxidation
air

Keywords

  • 6.x Multilayer
  • EUV Optics
  • Grazing-Incidence
  • La Surface Nitridation
  • LaN/B
  • LaN/La/B
  • XUV Optics

Cite this

@article{f1ee62e3b76d44e39d1c036dc4e80009,
title = "Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength",
abstract = "We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5{\%} at ≈6.66 nm, AOI = 77° off-normal was achieved, which was reduced by 0.5{\%} absolute in half a year, due to contamination of the top B layer.",
keywords = "6.x Multilayer, EUV Optics, Grazing-Incidence, La Surface Nitridation, LaN/B, LaN/La/B, XUV Optics",
author = "Dmitry Kuznetsov and Andrey Yakshin and J.M. Sturm and F. Bijkerk",
year = "2019",
month = "1",
day = "1",
doi = "10.1166/jnn.2019.16476",
language = "English",
volume = "19",
pages = "585--592",
journal = "Journal of nanoscience and nanotechnology",
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publisher = "American Scientific Publishers",
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}

Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength. / Kuznetsov, Dmitry ; Yakshin, Andrey ; Sturm, J.M.; Bijkerk, F.

In: Journal of nanoscience and nanotechnology, Vol. 19, No. 1, 01.01.2019, p. 585-592.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Grazing-Incidence La/B-Based Multilayer Mirrors for 6.x nm Wavelength

AU - Kuznetsov, Dmitry

AU - Yakshin, Andrey

AU - Sturm, J.M.

AU - Bijkerk, F.

PY - 2019/1/1

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N2 - We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5% at ≈6.66 nm, AOI = 77° off-normal was achieved, which was reduced by 0.5% absolute in half a year, due to contamination of the top B layer.

AB - We studied a possibility of fabricating LaN/B grazing incidence multilayer mirrors for 6.x nm radiation at a relatively large angle of incidence (AOI = 77° off-normal). LaN/B multilayers with a periodicity of 15 nm were successfully fabricated. But when stored in air for one week they showed strong deterioration of the surface due to oxidation of the topmost LaN layers, even though the multilayer was capped with a thin B film. In a series of experiments with variable LaN thickness it was found that the B protective properties depend on the thickness of the underlying LaN layer. Based on these experiments a 15 nm LaN/La/B multilayer with a passivation layer of only 0.4 nm of LaN was fabricated, which did not show any deterioration of the surface within a testing period of half a year. An initial reflectivity of 74.5% at ≈6.66 nm, AOI = 77° off-normal was achieved, which was reduced by 0.5% absolute in half a year, due to contamination of the top B layer.

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KW - La Surface Nitridation

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KW - LaN/La/B

KW - XUV Optics

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