Green laser crystallization of α-Si films using preformed α-Si Lines

I. Brunets, J. Holleman, Alexeij Y. Kovalgin, Antonius A.I. Aarnink, A. Boogaard, Peter Oesterlin, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    Low thermal budgets are required to realize 3-D integrated circuits (IC) such as e.g. stacked memory devices. For a better performance of circuit components, an additional improvement of low temperature silicon films is needed. Numerous crystallization techniques can provide polysilicon films with sufficiently large grains [1-3]. However, due to the uncontrollable formation of grain boundaries one can expect a strong variation of the device parameters. Although many techniques are capable of providing a sufficient control over crystal grains and grain boundaries, they require complicated additional process steps such as e.g. air-gap formation [2], seed formation in underlying material for the locationcontrolled grain growth [3], etc. This makes those techniques hardly applicable.
    Original languageEnglish
    Title of host publicationThin Film Transistor Technology 8
    EditorsYue Kuo
    PublisherThe Electrochemical Society Inc.
    Pages185-191
    Number of pages7
    ISBN (Print)1-56677-508-6
    DOIs
    Publication statusPublished - 29 Oct 2006
    Event8th Symposium on Thin Film Transistor Technologies, TFTT 2006 - Cancun, Mexico
    Duration: 29 Oct 20063 Nov 2006
    Conference number: 8

    Publication series

    NameECS Transactions 3, 8 (2006)
    PublisherECS
    Number10
    Volume3
    ISSN (Print)1938-5862
    ISSN (Electronic)1938-6737

    Conference

    Conference8th Symposium on Thin Film Transistor Technologies, TFTT 2006
    Abbreviated titleTFTT
    CountryMexico
    CityCancun
    Period29/10/063/11/06

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    Keywords

    • SC-ICF: Integrated Circuit Fabrication
    • IR-61702
    • METIS-237704
    • EWI-8406

    Cite this

    Brunets, I., Holleman, J., Kovalgin, A. Y., Aarnink, A. A. I., Boogaard, A., Oesterlin, P., & Schmitz, J. (2006). Green laser crystallization of α-Si films using preformed α-Si Lines. In Y. Kuo (Ed.), Thin Film Transistor Technology 8 (pp. 185-191). (ECS Transactions 3, 8 (2006); Vol. 3, No. 10). The Electrochemical Society Inc.. https://doi.org/10.1149/1.2356353