Grouwth and properties of IC dielectrics

Alexeij Y. Kovalgin, I.G. Isai, Zhichun Wang, V.E. Houtsma, J. Holleman, R. Dekker, Cora Salm, P.H. Woerlee, A.J. Mouthaan

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, The Netherlands
    Publication statusPublished - 14 Oct 1999

    Keywords

    • METIS-114848

    Cite this

    Kovalgin, A. Y., Isai, I. G., Wang, Z., Houtsma, V. E., Holleman, J., Dekker, R., ... Mouthaan, A. J. (1999, Oct 14). Grouwth and properties of IC dielectrics. Enschede, The Netherlands.
    Kovalgin, Alexeij Y. ; Isai, I.G. ; Wang, Zhichun ; Houtsma, V.E. ; Holleman, J. ; Dekker, R. ; Salm, Cora ; Woerlee, P.H. ; Mouthaan, A.J. / Grouwth and properties of IC dielectrics. 1999. Enschede, The Netherlands.
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    author = "Kovalgin, {Alexeij Y.} and I.G. Isai and Zhichun Wang and V.E. Houtsma and J. Holleman and R. Dekker and Cora Salm and P.H. Woerlee and A.J. Mouthaan",
    year = "1999",
    month = "10",
    day = "14",
    language = "Undefined",
    type = "Other",

    }

    Kovalgin, AY, Isai, IG, Wang, Z, Houtsma, VE, Holleman, J, Dekker, R, Salm, C, Woerlee, PH & Mouthaan, AJ 1999, Grouwth and properties of IC dielectrics. Enschede, The Netherlands.

    Grouwth and properties of IC dielectrics. / Kovalgin, Alexeij Y.; Isai, I.G.; Wang, Zhichun; Houtsma, V.E.; Holleman, J.; Dekker, R.; Salm, Cora; Woerlee, P.H.; Mouthaan, A.J.

    Enschede, The Netherlands. 1999, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Grouwth and properties of IC dielectrics

    AU - Kovalgin, Alexeij Y.

    AU - Isai, I.G.

    AU - Wang, Zhichun

    AU - Houtsma, V.E.

    AU - Holleman, J.

    AU - Dekker, R.

    AU - Salm, Cora

    AU - Woerlee, P.H.

    AU - Mouthaan, A.J.

    PY - 1999/10/14

    Y1 - 1999/10/14

    KW - METIS-114848

    M3 - Other contribution

    CY - Enschede, The Netherlands

    ER -

    Kovalgin AY, Isai IG, Wang Z, Houtsma VE, Holleman J, Dekker R et al. Grouwth and properties of IC dielectrics. 1999.