Grouwth and properties of IC dielectrics

Alexeij Y. Kovalgin, I.G. Isai, Zhichun Wang, V.E. Houtsma, J. Holleman, R. Dekker, Cora Salm, P.H. Woerlee, A.J. Mouthaan

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, The Netherlands
    Publication statusPublished - 14 Oct 1999

    Keywords

    • METIS-114848

    Cite this

    Kovalgin, A. Y., Isai, I. G., Wang, Z., Houtsma, V. E., Holleman, J., Dekker, R., ... Mouthaan, A. J. (1999, Oct 14). Grouwth and properties of IC dielectrics. Enschede, The Netherlands.