Grouwth and properties of IC dielectrics

Alexeij Y. Kovalgin, I.G. Isai, Zhichun Wang, V.E. Houtsma, J. Holleman, R. Dekker, Cora Salm, P.H. Woerlee, A.J. Mouthaan

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede, The Netherlands
    Publication statusPublished - 14 Oct 1999

    Keywords

    • METIS-114848

    Cite this