Grouwth and properties of IC dielectrics

Alexeij Y. Kovalgin; I.G. Isai; Zhichun Wang; V.E. Houtsma; J. Holleman; R. Dekker; Cora Salm; P.H. Woerlee; A.J. Mouthaan

Grouwth and properties of IC dielectrics

Alexeij Y. Kovalgin
, I.G. Isai
, Zhichun Wang
, V.E. Houtsma
, J. Holleman
, R. Dekker
, Cora Salm
, P.H. Woerlee
, A.J. Mouthaan

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede, The Netherlands
Publication status	Published - 14 Oct 1999

Keywords

METIS-114848

Cite this

@misc{424f69141d9f4f0891f96a523cfabc32,

title = "Grouwth and properties of IC dielectrics",

keywords = "METIS-114848",

author = "Kovalgin, \{Alexeij Y.\} and I.G. Isai and Zhichun Wang and V.E. Houtsma and J. Holleman and R. Dekker and Cora Salm and P.H. Woerlee and A.J. Mouthaan",

year = "1999",

month = oct,

day = "14",

language = "Undefined",

type = "Other",

}