Growth and Properties of LPCVD W-Si-N Barrier Layers

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of European Workshop Materials for Advanced Metallization
    Place of PublicationStresa - Italy
    Publication statusPublished - 28 Feb 2000


    • METIS-113960

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