Growth and Properties of LPCVD W-Si-N Barrier Layers

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of European Workshop Materials for Advanced Metallization
Place of Publication	Stresa - Italy
Pages	34-35
Publication status	Published - 28 Feb 2000

Keywords

@inproceedings{67dbb7f8dbe440dda6257d0c30445f45,

title = "Growth and Properties of LPCVD W-Si-N Barrier Layers",

keywords = "METIS-113960",

author = "{van Nieuwkasteele-Bystrova}, {Svetlana Nikolajevna} and J. Holleman and P.H. Woerlee",

year = "2000",

month = feb,

day = "28",

language = "Undefined",

pages = "34--35",

booktitle = "Proceedings of European Workshop Materials for Advanced Metallization",

}