Growth and Properties of LPCVD W-Si-N Layers

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, J. Holleman, A.A. van Zomeren, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{3b3567a3a6c24079910e4e3fbc501a09,

title = "Growth and Properties of LPCVD W-Si-N Layers",

keywords = "METIS-113899",

author = "{van Nieuwkasteele-Bystrova}, {Svetlana Nikolajevna} and J. Holleman and {van Zomeren}, A.A. and P.H. Woerlee",

year = "1999",

month = nov,

day = "24",

language = "Undefined",

isbn = "90-73461-18-9",

pages = "69--74",

booktitle = "SAFE'99",

}