Growth and surface characterization of piezoelectric A1N thin films on silicon (100) and (110) substrates

S. Saravanan, Enrico G. Keim, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationProceedings of the 14th Microscopy of semiconducting Materials
    Place of PublicationOxford
    Pages73-76
    Number of pages4
    Publication statusPublished - 2005
    EventMSM Royal Microscopical Society, Engeland: Proceedings of the 14th Microscopy of semiconducting Materials - Oxford
    Duration: 1 Jan 1900 → …

    Conference

    ConferenceMSM Royal Microscopical Society, Engeland
    CityOxford
    Period1/01/00 → …

    Keywords

    • METIS-229381

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