@inproceedings{f611f4ee61a449d9832b054625e50e41,
title = "Growth and surface characterization of piezoelectric A1N thin films on silicon (100) and (110) substrates",
keywords = "METIS-229381",
author = "S. Saravanan and Keim, {Enrico G.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2005",
language = "Undefined",
pages = "73--76",
booktitle = "Proceedings of the 14th Microscopy of semiconducting Materials",
note = "MSM Royal Microscopical Society, Engeland ; Conference date: 01-01-1900",
}